机械制造与自动化
機械製造與自動化
궤계제조여자동화
JIANGSU MACHINE BUILDING & AUTOMATION
2014年
6期
14-17
,共4页
程建建%聂伟荣%周织建%黄庆武
程建建%聶偉榮%週織建%黃慶武
정건건%섭위영%주직건%황경무
微机电系统%弹簧性能比较系数%柔度系数%结构面积
微機電繫統%彈簧性能比較繫數%柔度繫數%結構麵積
미궤전계통%탄황성능비교계수%유도계수%결구면적
MEMS%ratio of spring performance comparison%compliance coefficient%area of spring structure
针对平面微弹簧性能比较方法的缺乏,提出了弹簧柔度性能比较系数,通过在相等的弹簧占用结构面积情况下,分析C型、S型以及W型弹簧中任意两种弹簧柔度系数比的对数值分布情况。利用仿真软件验证了公式正确性,分析表明弹簧柔度性能比较系数理论值与仿真值相对误差小于5%。分析表明在S型弹簧与C型弹簧柔度性能比较系数以及C型弹簧与W型弹簧柔度性能比较系数为零情况下,弯梁夹角和弯半径与直粱(弯梁等效直粱长度)比值无关;在S型弹簧与C型弹簧柔度性能比较系数为零情况下,随夹角增大,弯半径与直粱比值先增大后减小。弯半径与直粱比值大小影响C型、S型、W型弹簧单位结构面积柔度系数顺序排列。
針對平麵微彈簧性能比較方法的缺乏,提齣瞭彈簧柔度性能比較繫數,通過在相等的彈簧佔用結構麵積情況下,分析C型、S型以及W型彈簧中任意兩種彈簧柔度繫數比的對數值分佈情況。利用倣真軟件驗證瞭公式正確性,分析錶明彈簧柔度性能比較繫數理論值與倣真值相對誤差小于5%。分析錶明在S型彈簧與C型彈簧柔度性能比較繫數以及C型彈簧與W型彈簧柔度性能比較繫數為零情況下,彎樑夾角和彎半徑與直粱(彎樑等效直粱長度)比值無關;在S型彈簧與C型彈簧柔度性能比較繫數為零情況下,隨夾角增大,彎半徑與直粱比值先增大後減小。彎半徑與直粱比值大小影響C型、S型、W型彈簧單位結構麵積柔度繫數順序排列。
침대평면미탄황성능비교방법적결핍,제출료탄황유도성능비교계수,통과재상등적탄황점용결구면적정황하,분석C형、S형이급W형탄황중임의량충탄황유도계수비적대수치분포정황。이용방진연건험증료공식정학성,분석표명탄황유도성능비교계수이론치여방진치상대오차소우5%。분석표명재S형탄황여C형탄황유도성능비교계수이급C형탄황여W형탄황유도성능비교계수위령정황하,만량협각화만반경여직량(만량등효직량장도)비치무관;재S형탄황여C형탄황유도성능비교계수위령정황하,수협각증대,만반경여직량비치선증대후감소。만반경여직량비치대소영향C형、S형、W형탄황단위결구면적유도계수순서배렬。
Due to lack of performance comparison method for planar micro spring, this paper proposes the performance comparison coefficient of the spring. Based on spring occupying equal area of structure, the compliance ratio logarithm distribution of any two of C-shaped, S-shaped, and W-shaped springs is analyzed. By use of the simulation software, the correctness of the formulas is veri-fied. The analytic result that its theoretical value and simulation value are less than 5% for the spring coefficient of compliance per-formance comparison. When the comparison coefficients of S-shaped and C-shaped spring and the C-shaped and W-shaped spring are zero, the angle of bending beam is irrelevant to the ratio of bend radius and straight beam ( bending beam length is equivalent to straight beam) . When the comparison coefficient of S-shaped and C-shaped spring is zero, the ratio of bend radius and straight beam increases initial y and then decreases along with the angle increasing. The ratio of bend radius and straight beam affects the sequence of the compliance of C-shaped, S-shaped, and W-shaped spring.