CAJ | 학술논문

在施加不同磁场强度及方向的稳恒磁场环境中,采用离子束溅射沉积法,在玻璃衬底上制备Sm-Fe-B超磁致伸缩薄膜(GMF)。使用LS-7010M-KC激光微位移传感器与交变梯度磁强计(AGM)分别测试薄膜悬臂梁磁偏转量与磁滞回线,以研究制备时施加稳恒磁场对薄膜磁致伸缩性能及软磁性能的影响。利用微磁学软件OOMMF,模拟研究了在外加相同实验磁场强度下,施加不同稳恒磁场强度对Sm-Fe-B薄膜磁矩分布的影响。实验研究结果表明,施加稳恒磁场下制备的薄膜样品,其饱和磁致伸缩性能明显优于无磁场环境所制备的样品；在实验条件下,薄膜样品的磁致伸缩性能随着施加稳恒磁场强度的增大而提高。模拟与实验研究结果均表明, Sm-Fe-BGMF的易磁化轴与沉积过程中所施加的稳恒磁场方向一致。在特定的悬臂梁结构应用中,薄膜沉积过程中通过改变施加不同稳恒磁场方向与其强度大小,可获得达到所需易磁化轴方向且具有较大磁偏转量的薄膜元件。
재시가불동자장강도급방향적은항자장배경중,채용리자속천사침적법,재파리츤저상제비Sm-Fe-B초자치신축박막(GMF)。사용LS-7010M-KC격광미위이전감기여교변제도자강계(AGM)분별측시박막현비량자편전량여자체회선,이연구제비시시가은항자장대박막자치신축성능급연자성능적영향。이용미자학연건OOMMF,모의연구료재외가상동실험자장강도하,시가불동은항자장강도대Sm-Fe-B박막자구분포적영향。실험연구결과표명,시가은항자장하제비적박막양품,기포화자치신축성능명현우우무자장배경소제비적양품；재실험조건하,박막양품적자치신축성능수착시가은항자장강도적증대이제고。모의여실험연구결과균표명, Sm-Fe-BGMF적역자화축여침적과정중소시가적은항자장방향일치。재특정적현비량결구응용중,박막침적과정중통과개변시가불동은항자장방향여기강도대소,가획득체도소수역자화축방향차구유교대자편전량적박막원건。
Sm-Fe-B GMF are prepared by ion beam sputtering deposition on glass substrate with steady magnetic field applied it.During deposition,the different magnetic fields strengths were chosen and the direction of mag-netic field perpendicular or parallel to the long axis of substrates.Deflections of cantilever and hysteresis loop of films were tested by LS-7010M-KC laser micro-displacement sensor and alternating gradient magnetometer (AGM),respectively;the influence of steady magnetic field to magnetostriction and soft magnetic properties were studied.The influence of different steady magnetic fields strengths to distribution of magnetic moment of Sm-Fe-B GMF under the same experiment magnetic field were studied by OOMMF.The results show that the saturated magnetostricion deposited at steady magnetic field were better than that without magnetic field,and the magnetostricion became better with the strength of magnetic field grows under the experimental condition. Both simulation and experimental research show,the easy magnetization direction could be induced by steady magnetic field and parallel to the direction of magnetic field.Hence,the proper choice of direction and strength for steady magnetic field during the deposition process could obtain the specific easy magnetization axis and large deflection,which in favor of the development of thin-film component.