玉林师范学院学报
玉林師範學院學報
옥림사범학원학보
Journal of Yulin Teachers College
2014年
5期
25-28
,共4页
掺铝氧化锌%室温%直流磁控溅射%折射率
摻鋁氧化鋅%室溫%直流磁控濺射%摺射率
참려양화자%실온%직류자공천사%절사솔
AZO%Room temperature%DC magnetron sputtering%Refractive index
以硝酸铝晶体和氧化锌粉末为原料，Al和Zn摩尔比为3：100，制备了相对密度为96%、电阻率为2.5×10-2Ω·cm的掺铝氧化锌（AZO）陶瓷靶材.采用直流磁控溅射法，室温条件下，在玻璃基片上制备了AZO透明导电薄膜.利用扫描电镜和X射线衍射分析了薄膜的微结构.薄膜晶粒尺寸大，分布均匀，可见光透过率为89.92%，光学带隙Eg为2.18 eV，Urbach能量Eu为3.9 eV，折射率n随波长的增大，先减小后增大，最后趋于稳定.
以硝痠鋁晶體和氧化鋅粉末為原料，Al和Zn摩爾比為3：100，製備瞭相對密度為96%、電阻率為2.5×10-2Ω·cm的摻鋁氧化鋅（AZO）陶瓷靶材.採用直流磁控濺射法，室溫條件下，在玻璃基片上製備瞭AZO透明導電薄膜.利用掃描電鏡和X射線衍射分析瞭薄膜的微結構.薄膜晶粒呎吋大，分佈均勻，可見光透過率為89.92%，光學帶隙Eg為2.18 eV，Urbach能量Eu為3.9 eV，摺射率n隨波長的增大，先減小後增大，最後趨于穩定.
이초산려정체화양화자분말위원료，Al화Zn마이비위3：100，제비료상대밀도위96%、전조솔위2.5×10-2Ω·cm적참려양화자（AZO）도자파재.채용직류자공천사법，실온조건하，재파리기편상제비료AZO투명도전박막.이용소묘전경화X사선연사분석료박막적미결구.박막정립척촌대，분포균균，가견광투과솔위89.92%，광학대극Eg위2.18 eV，Urbach능량Eu위3.9 eV，절사솔n수파장적증대，선감소후증대，최후추우은정.
The ZnO:Al(AZO) ceramic targets were fabricated using Al(NO3)3﹒9H2O and ZnO when the atom ratio of A1 to Zn is 3:100. The relative density of the target was 96%, the resistivity is 2.5×10-2 Ω﹒cm. The AZO thin film was grown by DC magnetron technique at room-temperature on the glass substrate. The film microstructure was analyzed by XRD and Scanning electron microscopy. The film show larger grain size and uniform grain distribution, the transmittance is 89.92%, the optical band gapEg is 3.63 eV, the Urbach energyEu is 3.9eV.The refractive index n firstly decreased and then increased with the increase of wavelength, and became stable lastly.
