CAJ | 학술논문

利用多弧离子镀技术，以乙炔和氮气为反应气体，在316 L不锈钢和单晶硅基体上设计3种不同的过渡层（无过渡层，Cr，CrN）制备CrCN涂层，通过X射线衍射仪（XRD）、扫描电镜（SEM）、纳米压痕仪、CSM划痕测试仪和UMT-3多功能摩擦磨损试验机等对3种涂层的微观结构、力学性能和摩擦学性能进行表征.结果表明： CrCN，Cr/CrCN及CrN/CrCN涂层的平均表面粗糙度分别为77.3 nm，74.5 nm及68.1 nm，整体表现出递减的趋势.CrCN，Cr/CrCN及CrN/CrCN涂层的结合力和硬度分别为20.5 N，43 N，61 N及17.4 GPa，21.4 GPa，24.1 GPa.较之于单层CrCN涂层， CrN/CrCN复合涂层的硬度及结合力提高最为显著，并对CrCN涂层起到强有力的支撑作用，从而在大气、去离子水、海水环境下表现出较低的摩擦系数及磨损率.
이용다호리자도기술，이을결화담기위반응기체，재316 L불수강화단정규기체상설계3충불동적과도층（무과도층，Cr，CrN）제비CrCN도층，통과X사선연사의（XRD）、소묘전경（SEM）、납미압흔의、CSM화흔측시의화UMT-3다공능마찰마손시험궤등대3충도층적미관결구、역학성능화마찰학성능진행표정.결과표명： CrCN，Cr/CrCN급CrN/CrCN도층적평균표면조조도분별위77.3 nm，74.5 nm급68.1 nm，정체표현출체감적추세.CrCN，Cr/CrCN급CrN/CrCN도층적결합력화경도분별위20.5 N，43 N，61 N급17.4 GPa，21.4 GPa，24.1 GPa.교지우단층CrCN도층， CrN/CrCN복합도층적경도급결합력제고최위현저，병대CrCN도층기도강유력적지탱작용，종이재대기、거리자수、해수배경하표현출교저적마찰계수급마손솔.
CrCN coating is deposited on 316 L stainless steel and single crystal silicon by Multi-Arc ion plating technique with ethyne and nitrogen as reactant gas. Microstructures, mechanical performance and tribological properties are systematically investigated by XRD, SEM, nano-indentation, CSM starch tester and Ultra- functional attrition testing machine. The results show that the average roughness of CrCN, Cr/CrCN and CrN/CrCN coating are 77.3 nm, 74.5 nm and 68.1 nm, respectively. The nanohardness and critical load of CrCN, Cr/CrCN and CrN/CrCN coating are 20.5 N, 43 N, 61 N and 17.4 GPa, 21.4 GPa, 24.1 GPa, respectively. Compared with CrCN coating, the nanohardness and critical load of CrN/CrCN coating are enhanced significantly. The CrN interlayer plays an important role to support the CrCN coating which leads to the low friction coefficient and wear ratio of the CrN/CrCN coatings in ambient air, distilled water and seawater.