CAJ | 학술논문

无压烧结钛酸锶（ SrTiO3）电瓷基片表面不平整、均匀性差且翘曲度大，无法有效使用；采用研磨加工容易破碎、加工效果差。利用柔性加载双面研磨的加工工艺，优化分析了磨料种类、磨料粒度、磨料浓度、研磨压力和转速对钛酸锶电瓷基片研磨加工的影响，使钛酸锶电瓷基片表面达到了粗糙度为Ra0．268μm、去除率为4．6μm／min、厚度为0．19mm，以及厚度误差小于0．01mm的加工效果。
무압소결태산송（ SrTiO3）전자기편표면불평정、균균성차차교곡도대，무법유효사용；채용연마가공용역파쇄、가공효과차。이용유성가재쌍면연마적가공공예，우화분석료마료충류、마료립도、마료농도、연마압력화전속대태산송전자기편연마가공적영향，사태산송전자기편표면체도료조조도위Ra0．268μm、거제솔위4．6μm／min、후도위0．19mm，이급후도오차소우0．01mm적가공효과。
Pressureless sintering of SrTiO 3 ceramics substrate can ’ t be used effectively ,because of its unflatness ,poor uniformity and warpage surface .The use of lapping process has the problems of easily broken ,and poor processing effect .The flexible loading double-sided lapping process was used .The factors that influence the surface roughness and integrality ,such as the kind of abra-sive,abrasive concentration,the lapping pressure and lapping disc rotation speed ,were analyzed.Results show that the SrTiO3 substrate reached a surface roughness of 0.268μm,removal rate of 4.6μm/min and thickness of 0.19mm with an error less than 0.01mm by this double-sided lapping process .