太赫兹科学与电子信息学报
太赫玆科學與電子信息學報
태혁자과학여전자신식학보
Information and Electronic Engineering
2014年
6期
937-941
,共5页
李国会%杨媛%何忠武%田飞%向汝建%徐宏来
李國會%楊媛%何忠武%田飛%嚮汝建%徐宏來
리국회%양원%하충무%전비%향여건%서굉래
电涡流传感器%温度漂移%温度补偿%热稳定性
電渦流傳感器%溫度漂移%溫度補償%熱穩定性
전와류전감기%온도표이%온도보상%열은정성
eddy current sensor%temperature drift%temperature compensation%thermal stability
介绍电涡流传感器位移测量原理，分析温度变化时传感器线圈和探头热胀冷缩在测量位移过程中造成的温度漂移现象。针对传感器的温漂，研制出具有温度补偿功能的电涡流传感器热稳定性标定装置，对传感器输出电压进行温度补偿，减小温度变化对传感器输出电压的影响。同时介绍利用该装置进行温度标定的实现方法，并进行实验验证，实现固定位移条件下环境温度变化时对电涡流传感器输出电压的标定，与无温度补偿时输出电压对比，电压变化量减小了近50%。
介紹電渦流傳感器位移測量原理，分析溫度變化時傳感器線圈和探頭熱脹冷縮在測量位移過程中造成的溫度漂移現象。針對傳感器的溫漂，研製齣具有溫度補償功能的電渦流傳感器熱穩定性標定裝置，對傳感器輸齣電壓進行溫度補償，減小溫度變化對傳感器輸齣電壓的影響。同時介紹利用該裝置進行溫度標定的實現方法，併進行實驗驗證，實現固定位移條件下環境溫度變化時對電渦流傳感器輸齣電壓的標定，與無溫度補償時輸齣電壓對比，電壓變化量減小瞭近50%。
개소전와류전감기위이측량원리，분석온도변화시전감기선권화탐두열창랭축재측량위이과정중조성적온도표이현상。침대전감기적온표，연제출구유온도보상공능적전와류전감기열은정성표정장치，대전감기수출전압진행온도보상，감소온도변화대전감기수출전압적영향。동시개소이용해장치진행온도표정적실현방법，병진행실험험증，실현고정위이조건하배경온도변화시대전와류전감기수출전압적표정，여무온도보상시수출전압대비，전압변화량감소료근50%。
The displacement detection principle of eddy current sensor is introduced. The temperature drifting phenomena occurred in measuring displacement are analyzed, which are caused by thermal expansion and contraction of sensor winding and detector. Referring to the temperature drifting of sensor, a calibrating device with compensating function of eddy current sensor is manufactured, and the temperature for output voltage of sensor is compensated, which reduces the influence of temperature changes on output voltage of sensor. The implementation method of temperature calibration by this device is proposed and validated in experiment, which realizes the calibration for output voltage of eddy current sensor under the circumstance temperature variation and fixed displacement. Comparing to the detection without temperature compensation, the variation of voltage decreases by about 50%.
