CAJ | 학술논문

通过蒸发捕集法与溶液吸收法两种前处理方法，利用高分辨电感耦合等离子体质谱对高纯氨中痕量金属杂质进行上机检测。实验表明，双聚焦磁质谱对稀氨水中金属杂质方法检出限低达10-12级，对高纯氨中金属杂质方法检测限低于1×10-9 m/m。方法便捷、准确，容易避免前处理污染，可以作为高纯氨中金属杂质检测的有效手段。
통과증발포집법여용액흡수법량충전처리방법，이용고분변전감우합등리자체질보대고순안중흔량금속잡질진행상궤검측。실험표명，쌍취초자질보대희안수중금속잡질방법검출한저체10-12급，대고순안중금속잡질방법검측한저우1×10-9 m/m。방법편첩、준학，용역피면전처리오염，가이작위고순안중금속잡질검측적유효수단。
By means of evaporation capture method and solution absorption method, the project take advantage of high resolution ICP-MS to detect metal impurities in high purity ammonia. Experimental results show that LOD of most metallic element in diluted ammonia water will achieve 10-12 level by means of sector field spectrometer, accordingly it can be as low as 1×10-9 m/m in high purity ammonia. The method is convenient, accurate and easy to avoid the pollution caused by pretreatment, therefore it can be used for detecting metal impurities in high purity ammonia.