CAJ | 학술논문

针对微小非球面斜轴镜面磨削时存在的表面/亚表面缺陷、表面粗糙度均匀性差以及传统抛光工艺难以抛光微小非球面等一系列难题，开发一种利用磁性复合流体和斜轴抛光方式进行微小凹非球面超精密抛光的新工艺。以口径在10 mm以下的超精密微细透镜及微细模具中的各种微小球面、微小凹非球面为主要加工对象，展开磁性复合流体抛光工艺研究。分析磁性复合流体工艺参数对加工质量和表面去除率的影响，优化工艺参数，解决了微小非球面纳米抛光的关键技术问题。
침대미소비구면사축경면마삭시존재적표면/아표면결함、표면조조도균균성차이급전통포광공예난이포광미소비구면등일계렬난제，개발일충이용자성복합류체화사축포광방식진행미소요비구면초정밀포광적신공예。이구경재10 mm이하적초정밀미세투경급미세모구중적각충미소구면、미소요비구면위주요가공대상，전개자성복합류체포광공예연구。분석자성복합류체공예삼수대가공질량화표면거제솔적영향，우화공예삼수，해결료미소비구면납미포광적관건기술문제。
Aiming at the problems of surface/subsurface defects, poor roughness uniformity and difficult-to-polishing of micro aspheric surface using inclined-axis mirror grinding and conventional polishing process, a new process integrated with magnetic compound fluid and inclined-axis polishing is proposed for ultra-preci-sion polishing of micro aspheric surface. A study which takes micro spherical and aspheric surface of micro lens and mold with less than 10mm in diameter for objects, will be unfolded for magnetic compound fluid. It was investigated that the influence of the process parameters on machining quality and the surface removal rate of magnetic compound fluid and the parameters was optimized. It solves the key technical problems for nano-polishing of micro aspheric surface.