CAJ | 학술논문

由碲镉汞薄膜材料的厚度不均匀性入手，改进水平滑舟液相外延工艺，从而改善了碲镉汞薄膜材料组分均匀性，使距薄膜边缘1.5 mm（衬底边缘2.5 mm）以内的薄膜材料组分均匀性得到了长足的提高，增大了薄膜材料用于制备焦平面器件的利用率。中波碲镉汞材料（?1/2(77 K)＝4.8?m）?x≤0.001，与国外水平相当。
유제력홍박막재료적후도불균균성입수，개진수평활주액상외연공예，종이개선료제력홍박막재료조분균균성，사거박막변연1.5 mm（츤저변연2.5 mm）이내적박막재료조분균균성득도료장족적제고，증대료박막재료용우제비초평면기건적이용솔。중파제력홍재료（?1/2(77 K)＝4.8?m）?x≤0.001，여국외수평상당。
Through improving the thickness uniformity of HgCdTe films by optimizing the art of LPE in the slider technique, we have upgraded compositional uniformity of films. Within the border of films 1.5mm, the films’ composition is uniform. The area which can prepare for the infrared devices increases to a great extent.?x-values of the MWIR films of HgCdTe(?1/2(77 K)=4.8?m) are less than or equal to 0.001, which is same as the foreign level.