CAJ | 학술논문

在激光电化学复合微细加工系统中，利用透光导电的氧化铟锡(Indium tin oxide, ITO)导电玻璃作为工具阴极，引入激光辐照能量，保证了激光电化学体系的高效复合。采用脉冲激光辐照和电化学溶解蚀除的方法对铝合金进行了加工试验，工件表面在均匀电场作用下所形成的钝化膜，在激光定域辐照的热力冲击作用下被破坏，使基体材料发生电化学反应，而非辐照区域则不发生反应，从而提高了电化学反应的定域性。研究了复合加工定域性受激光热力冲击和气泡折射影响的机理，根据试验结果分析了激光能量，加工电流以及不同加工方式对复合加工定域性的影响，采用优化的工艺参数，有效抑制了激光热影响区和电化学杂散腐蚀，实现了成形精度和表面质量均较好的三维槽腔加工。
재격광전화학복합미세가공계통중，이용투광도전적양화인석(Indium tin oxide, ITO)도전파리작위공구음겁，인입격광복조능량，보증료격광전화학체계적고효복합。채용맥충격광복조화전화학용해식제적방법대려합금진행료가공시험，공건표면재균균전장작용하소형성적둔화막，재격광정역복조적열력충격작용하피파배，사기체재료발생전화학반응，이비복조구역칙불발생반응，종이제고료전화학반응적정역성。연구료복합가공정역성수격광열력충격화기포절사영향적궤리，근거시험결과분석료격광능량，가공전류이급불동가공방식대복합가공정역성적영향，채용우화적공예삼수，유효억제료격광열영향구화전화학잡산부식，실현료성형정도화표면질량균교호적삼유조강가공。
By integrating indium tin oxide (ITO) conductive glass into the laser electrochemical micro machining system as tool cathode, the efficient combination of laser electrochemical machining is achieved with laser irradiation. In the established experimental system, the aluminum alloy is etched by the compound processing of laser and electrochemistry. The thermal-mechanical shock effect of laser local irradiation could remove the passivation layer in a uniform electric field, and the material at this zone is etched. However, the other regional material could not be removed because of the protection of the passivation layer, which enhances the localisation of electrochemical machining significantly. The influence mechanism of the thermal-mechanical shock of laser and the refraction characteristic of bubbles on the localization of combined machining is investigated theoretically. Based on the experiment result, the influence of the laser power, machining current and different processing methods on the localization of combined machining is also analyzed. The stray-current corrosion is restrained effectively and a three dimensional cavity with good shape precision and surface quality is acquired successfully with reasonable processing parameters.