机械工程学报
機械工程學報
궤계공정학보
CHINESE JOURNAL OF MECHANICAL ENGINEERING
2014年
23期
194-199
,共6页
吴东江%姚龙元%马广义%牛方勇%郭东明
吳東江%姚龍元%馬廣義%牛方勇%郭東明
오동강%요룡원%마엄의%우방용%곽동명
飞秒激光%表面粗糙度%偏振态%烧蚀形貌%线重叠率
飛秒激光%錶麵粗糙度%偏振態%燒蝕形貌%線重疊率
비초격광%표면조조도%편진태%소식형모%선중첩솔
femtosecond laser%surface roughness%polarization state%ablation morphology%line overlap rate
基于不同激光功率线烧蚀试验,研究激光偏振模式对烧蚀线宽度及表面形貌特征的影响。结合线烧蚀优化参数,开展不同线重叠率δ的面烧蚀试验,利用表面轮廓仪进行烧蚀表面粗糙度分析;建立扫描速度和线重叠率对残留高度影响的关系表达式,并进行计算分析。研究表明,当线偏振方向平行于扫描方向时,线偏振光烧蚀线质量优于圆偏振光,且其烧蚀线宽比圆偏振光大。当δ由65%增大到90%时,线偏振光烧蚀面垂直于扫描方向的轮廓算数平均偏差Ra先减小后增大,并在δ=80%时达到最小值1.05μm;圆偏振光Ra随δ增大而减小,在δ=90%时达到最小值1.63μm。此外,烧蚀面微观不平度十点高度Rz计算结果与试验结果基本吻合,且Rz与δ呈线性关系,并随δ增大而减小。
基于不同激光功率線燒蝕試驗,研究激光偏振模式對燒蝕線寬度及錶麵形貌特徵的影響。結閤線燒蝕優化參數,開展不同線重疊率δ的麵燒蝕試驗,利用錶麵輪廓儀進行燒蝕錶麵粗糙度分析;建立掃描速度和線重疊率對殘留高度影響的關繫錶達式,併進行計算分析。研究錶明,噹線偏振方嚮平行于掃描方嚮時,線偏振光燒蝕線質量優于圓偏振光,且其燒蝕線寬比圓偏振光大。噹δ由65%增大到90%時,線偏振光燒蝕麵垂直于掃描方嚮的輪廓算數平均偏差Ra先減小後增大,併在δ=80%時達到最小值1.05μm;圓偏振光Ra隨δ增大而減小,在δ=90%時達到最小值1.63μm。此外,燒蝕麵微觀不平度十點高度Rz計算結果與試驗結果基本吻閤,且Rz與δ呈線性關繫,併隨δ增大而減小。
기우불동격광공솔선소식시험,연구격광편진모식대소식선관도급표면형모특정적영향。결합선소식우화삼수,개전불동선중첩솔δ적면소식시험,이용표면륜곽의진행소식표면조조도분석;건립소묘속도화선중첩솔대잔류고도영향적관계표체식,병진행계산분석。연구표명,당선편진방향평행우소묘방향시,선편진광소식선질량우우원편진광,차기소식선관비원편진광대。당δ유65%증대도90%시,선편진광소식면수직우소묘방향적륜곽산수평균편차Ra선감소후증대,병재δ=80%시체도최소치1.05μm;원편진광Ra수δ증대이감소,재δ=90%시체도최소치1.63μm。차외,소식면미관불평도십점고도Rz계산결과여시험결과기본문합,차Rz여δ정선성관계,병수δ증대이감소。
The influences of polarization state on ablation line width and morphology are investigated based on line experiments of different laser power. The surface ablation experiments of different line overlap rateδ are carried out in the combination of linear ablation optimized parameters. Also, the surface roughness is analyzed by using surface profiler. In addition, the relational expressions of scanning velocity and line overlap rate on the influence of scallop height are established, and then the expressions are calculated. The results show that the ablation line quality of linearly polarized laser is better than the circularly polarized laser, and its line width is greater than that of circularly polarized laser. Whenδ increases from 65% to 90%, the arithmetical mean deviationRa of ablation surface for linearly polarized laser decreases firstly and then increases, and it reaches to a minimum of 1.05μm atδ=80%. But, theRaof circularly polarized laser decreases with the increasing ofδ, and it reaches to a minimum of 1.63μm atδ=90%. The calculated results of roughnessRz are consistent with the experimental results, and it is a kind of linear relation betweenRz andδ. Also, theRzdecreases with the increasing ofδ.