CAJ | 학술논문

通过磁控溅射工艺制备出三种框式薄膜电感，其中特殊磁芯电感、全磁膜电感为设计制作的具有闭合磁性回路的特殊薄膜电感，而三文治结构电感是目前流行的薄膜电感，这些电感均由下层磁芯层、下层绝缘层（聚偏二氯乙烯，厚度约为40μm）、线圈和线圈中心的磁膜、上层绝缘层和上层磁芯层组成，其差别在于磁芯结构不同。在1~3 MHz频率范围内，比较了三种电感的等效电感、寄生电容和损耗因子。结果表明：与三文治结构电感和全磁膜电感相比，特殊磁芯电感有较高的等效电感量和较小的寄生电容，但损耗较后两者高。
통과자공천사공예제비출삼충광식박막전감，기중특수자심전감、전자막전감위설계제작적구유폐합자성회로적특수박막전감，이삼문치결구전감시목전류행적박막전감，저사전감균유하층자심층、하층절연층（취편이록을희，후도약위40μm）、선권화선권중심적자막、상층절연층화상층자심층조성，기차별재우자심결구불동。재1~3 MHz빈솔범위내，비교료삼충전감적등효전감、기생전용화손모인자。결과표명：여삼문치결구전감화전자막전감상비，특수자심전감유교고적등효전감량화교소적기생전용，단손모교후량자고。
Three kinds of frame type thin film inductors were prepared by magnetron sputtering process. The special magnetic core inductor and the whole magnetic film inductor were designed and fabricated based on closed magnetic circuit, and the sandwich inductor was characteristic of the currently popular structure. The inductors were consisted of the lower magnetic core layer, the lower insulating layer (ingredients polyvinylidene chloride, thickness of 40μm), the coil, the magnetic film in the coil center, the upper insulating layer and the upper magnetic core layer, with different magnetic core structures. The equivalent inductance, stray capacitance, and loss factor of three kinds of inductor in 1–3 MHz frequency were compared. The results show that the special magnetic core inductor has a higher equivalent inductance, lower stray capacitance and higher power consumption than those of the other inductors.