CAJ | 학술논문

本文从离子与物质相互作用的基本原理出发，用蒙特卡罗方法模拟了用质子弹性散射符合分析方法分析表面含氢的几组不同厚度的金属薄膜样品的实验，详细介绍了模拟过程中影响深度分辨率的多种因素，如束流能量、能损歧离、角度歧离等。本文基于2×1．7MV串列静电加速器可以提供的质子束能量范围，通过模拟计算得到用能量为1．5 MeV的质子束分析厚度为1～3微米的铝膜，深度分辨可以达到0．2微米。本文还给出了内部含氢的多层铝膜的模拟结果，表明此方法可以很好地分析薄膜内部氢元素的深度分布。
본문종리자여물질상호작용적기본원리출발，용몽특잡라방법모의료용질자탄성산사부합분석방법분석표면함경적궤조불동후도적금속박막양품적실험，상세개소료모의과정중영향심도분변솔적다충인소，여속류능량、능손기리、각도기리등。본문기우2×1．7MV천렬정전가속기가이제공적질자속능량범위，통과모의계산득도용능량위1．5 MeV적질자속분석후도위1～3미미적려막，심도분변가이체도0．2미미。본문환급출료내부함경적다층려막적모의결과，표명차방법가이흔호지분석박막내부경원소적심도분포。
Analysis of hydrogen depth profile by the proton elastic scattering with coincidence method was simu-lated by Monte Carlo method.The factors affecting the depth resolution of hydrogen were studied.According to the results, the depth resolutions of about 0.2 m for 1~3 m thickness aluminum foils with hydrogen contamina-tion on the surface can be achieved by 1.5 MeV proton beam.Meanwhile, the aluminum foils with inner hydro-gen layer were simulated.The results indicated that the method could also be used to analyze the hydrogen dis-tribution inside the sample.