CAJ | 학술논문

采用电弧离子镀方法在不锈钢基体上沉积了TiN薄膜，考察了弧靶与基体之间等离子通道上的轴向磁场强度（0－300高斯）对薄膜表面形貌、组织结构、硬度及弹性模量的影响。结果表明，随着轴向磁场的不断增强，等离子体密度及能量密度不断增大，阴极靶斑点处被熔化的靶材区域增大，阴极斑点附近局部蒸气压升高，薄膜表面较大尺寸的大颗粒数、凹坑数量会因此增多，薄膜粗糙度会因此增大；生长取向由（111）面择优转为（220）面择优并最终趋向无择优取向；薄膜表面硬度及弹性模量均呈现先增大后减小的趋势。
채용전호리자도방법재불수강기체상침적료TiN박막，고찰료호파여기체지간등리자통도상적축향자장강도（0－300고사）대박막표면형모、조직결구、경도급탄성모량적영향。결과표명，수착축향자장적불단증강，등리자체밀도급능량밀도불단증대，음겁파반점처피용화적파재구역증대，음겁반점부근국부증기압승고，박막표면교대척촌적대과립수、요갱수량회인차증다，박막조조도회인차증대；생장취향유（111）면택우전위（220）면택우병최종추향무택우취향；박막표면경도급탄성모량균정현선증대후감소적추세。
TiN film was deposited on stainless steel substrate by arc ion plating method.Influences of the axial magnetic field which was applied along the plasma conductive channel between the target and sub-strate on the surface morphology,crystal structure,hardness and elastic modulus of the deposited films have been investigated.The results showed that with increasing intensity of the axial magnetic field,the plasma density,the energy density and the melt area of spot for cathode target material increase and the partial vapor pressure elevates,therefore,the number of the larger macro-particles and the surface pit,the roughness of the films will be increased.The growth orientation changes from (111)plane to (220)plane and eventually tends to random orientation when increasing intensity of the axial magnetic field.The film surface hardness and elastic modulus increase firstly and then decrease when increasing intensity of the axi-al magnetic field.