CAJ | 학술논문

石英玻璃的低温键合技术作为一种可靠的固体连接方式，受到了欧美发达国家的广泛重视，并在航天、基础科研、强激光等诸多领域得到了广泛应用。该技术基于氢氧化物催化玻璃表面的水解/脱水过程，通过在键合界面之间形成硅酸盐三维网状结构实现键合，是一种高强度、高精确性、可靠的室温键合方法。对石英玻璃低温键合技术的工作原理和基本工艺过程进行了阐述，并实现了石英玻璃的低温键合。对键合界面进行了多项环境适应性试验，结果表明：相对传统的光胶方法，低温键合技术在键合强度、温度冲击环境及水环境的适应性方面表现出显著优势，在键合均匀性、精确度、透明度、密封性、常规温度及振动环境方面与传统方法表现相当。
석영파리적저온건합기술작위일충가고적고체련접방식，수도료구미발체국가적엄범중시，병재항천、기출과연、강격광등제다영역득도료엄범응용。해기술기우경양화물최화파리표면적수해/탈수과정，통과재건합계면지간형성규산염삼유망상결구실현건합，시일충고강도、고정학성、가고적실온건합방법。대석영파리저온건합기술적공작원리화기본공예과정진행료천술，병실현료석영파리적저온건합。대건합계면진행료다항배경괄응성시험，결과표명：상대전통적광효방법，저온건합기술재건합강도、온도충격배경급수배경적괄응성방면표현출현저우세，재건합균균성、정학도、투명도、밀봉성、상규온도급진동배경방면여전통방법표현상당。
Low temperature bonding for quartz glass as a reliable solid connection technology has received extensive attention in developed countries in Europe and America, and has been widely used in many fields such as aerospace, basic research, strong laser etc.. Low temperature bonding based on hydroxide-catalyzed hydration/dehydration at the glass surface is a low temperature bonding method with high breaking strength, high precision and high reliability by forming three-dimensional silicate networks at the interface. The physical principle and the basic process of low temperature bonding was demonstrated and the low temperature bonding for quartz glass was realized too. The results of the bonding interface of environmental adaptability test show that, compared with conventional optical contact method, low temperature bonding is superior in bonding strength and adaptability in temperature shock environment and water environment, while low temperature bonding matches optical contact in uniformity, precision, transparency, vacuum seal and adaptability in regular temperature environment and vibration environment.