CAJ | 학술논문

太赫兹波强度调制器对太赫兹技术的发展至关重要。亚波长金属孔阵列可以激发表面等离子激元，增加入射电磁波的透射效率，极大地提高调制器的调制深度。提出了一种基于表面等离子激元的光控太赫兹波强度调制器。首先给出了器件所依赖的基本原理；其次利用传统的微纳加工技术在半绝缘砷化镓衬底上制作出二维亚波长金属孔阵列；最后搭建了太赫兹时域光谱系统，测试了器件样品对太赫兹波的透过率。结果表明：亚波长金属孔阵列可以引起透射率的异常增强，且透射率随着泵浦光强的增大而减小，在特定频率点实现了较高的调制深度。此研究为实现高调制深度的太赫兹波强度调制器提供了参考。
태혁자파강도조제기대태혁자기술적발전지관중요。아파장금속공진렬가이격발표면등리자격원，증가입사전자파적투사효솔，겁대지제고조제기적조제심도。제출료일충기우표면등리자격원적광공태혁자파강도조제기。수선급출료기건소의뢰적기본원리；기차이용전통적미납가공기술재반절연신화가츤저상제작출이유아파장금속공진렬；최후탑건료태혁자시역광보계통，측시료기건양품대태혁자파적투과솔。결과표명：아파장금속공진렬가이인기투사솔적이상증강，차투사솔수착빙포광강적증대이감소，재특정빈솔점실현료교고적조제심도。차연구위실현고조제심도적태혁자파강도조제기제공료삼고。
Terahertz modulator plays an important role in the development of terahertz technology. Optical transmission efficiency of subwavelength metallic hole arrays can be much higher because of the excitation of surface plasmon polaritons, and a higher modulation depth could be obtained by using this structure. A terahertz modulator based on subwavelength metallic hole arrays controlled by optical pump was demonstrated. Firstly, the principles of our sample were researched. Secondly, two- dimensional subwavelength metallic hole arrays were fabricated on semi- insulating GaAs substrate. Lastly, utilizing the terahertz time domain spectroscopy system, the transmission of terahertz radiation through subwavelength hole arrays was measured. Experimental results show that extraordinary optical transmission is excited by subwavelength hole arrays, and optically pumping reduces the terahertz transmission. A higher modulation depth is obtained at special frequency. This research can be the reference to the design and fabrication of terahertz modulator with high modulation depth.