CAJ | 학술논문

基于LabVIEW图形化编程软件和PCI1711多功能卡，设计开发了用于真空等离子镀膜机的自动控制系统，实现了对四面体非晶碳薄膜制备工艺的自动控制。该系统共分为5个模块：镀膜机各设备的电源控制（70路）、模/数转换（32路）、数模转换（32路）、PWM输出（6路）、机间通信（采用RS 485总线）。对电源的控制通过电磁继电器实现；数/模转换通过开关量输出接口控制D/A转换器予以实现；模数转换通过多路模拟开关芯片进行选通后送到数据采集卡的模拟量输入端予以实现；通过RS 485总线实现对复合真空计、涡轮分子泵、气体质量流量计等的控制与数据获取。实验表明，该控制系统具有对真空度、离子束表面改性、真空磁过滤多弧镀膜的实时监测与控制功能，实现了薄膜制备的计算机控制。
기우LabVIEW도형화편정연건화PCI1711다공능잡，설계개발료용우진공등리자도막궤적자동공제계통，실현료대사면체비정탄박막제비공예적자동공제。해계통공분위5개모괴：도막궤각설비적전원공제（70로）、모/수전환（32로）、수모전환（32로）、PWM수출（6로）、궤간통신（채용RS 485총선）。대전원적공제통과전자계전기실현；수/모전환통과개관량수출접구공제D/A전환기여이실현；모수전환통과다로모의개관심편진행선통후송도수거채집잡적모의량수입단여이실현；통과RS 485총선실현대복합진공계、와륜분자빙、기체질량류량계등적공제여수거획취。실험표명，해공제계통구유대진공도、리자속표면개성、진공자과려다호도막적실시감측여공제공능，실현료박막제비적계산궤공제。
A automatic control system for vacuum plasma coating machine was designed by means of graphical program?ming software LabVIEW and data acquisition card PCI1711,which realized automatic control of tetrahedral amorphous carbon film preparation. The design of the system hardware and the core software is described in detail. This system can be divided in?to five modules:power control,A/D conversion,D/A conversion,PWM output and inter?host communication. The power sup?ply is mainly controlled by electromagnetic relay. D/A conversion is implemented by output on?off interface. A/D Conversion can be achieved by the multi?channel analog switch chip and data acquisition card. The composite vacuometer,molecular pump and gas mass flowmeter ,and their data acquisition are controlled through RS485 data bus. The experiment results indi?cate that the control system has the real?time monitoring and control functions of vacuum degree,ion beam surface modifica?tion,and filtered cathode vacuum arc coating. Computer control of film preparation was realized.