CAJ | 학술논문

针对目前纳米切削机理研究方法中切削过程无法在线高分辨力观测等瓶颈问题，设计并搭建了一套集成于扫描电子显微镜高真空条件下的纳米切削实验装置，开展了该实验装置的运动精度分析、典型单晶材料纳米切削在线观测等研究．该装置在切削及切深方向均能实现7,μm 的位移输出，闭环分辨力为0.6,nm．通过白光干涉仪对纳米切削台阶加工结果的测量，分析装置运动精度，实现了切深分别为59.3,nm、115.1,nm 和161.2,nm 的台阶结构加工．利用直线刃金刚石刀具对单晶铜和单晶硅材料进行了纳米切削实验，实验结果表明所研制的纳米切削装置能够实现纳米尺度材料去除的在线高分辨力观测．
침대목전납미절삭궤리연구방법중절삭과정무법재선고분변력관측등병경문제，설계병탑건료일투집성우소묘전자현미경고진공조건하적납미절삭실험장치，개전료해실험장치적운동정도분석、전형단정재료납미절삭재선관측등연구．해장치재절삭급절심방향균능실현7,μm 적위이수출，폐배분변력위0.6,nm．통과백광간섭의대납미절삭태계가공결과적측량，분석장치운동정도，실현료절심분별위59.3,nm、115.1,nm 화161.2,nm 적태계결구가공．이용직선인금강석도구대단정동화단정규재료진행료납미절삭실험，실험결과표명소연제적납미절삭장치능구실현납미척도재료거제적재선고분변력관측．
To solve the problem that online high-resolution observation failed to be realized in cutting process with the current nanometric cutting mechanism,a nanometric cutting device under high vacuum condition based on SEM was designed and established. Motion accuracy analysis of the device was carried out and nanometric cutting of typical single crystal materials with online observation was researched. The proposed device can realize displacement output in the range of 7 μm with closed-loop resolution of 0.6,nm in both cutting direction and depth direction. The motion accuracy of the device was measured by white light interferometer. Step structures with different cutting depths were machined and the height differences between the steps were 59.3 nm,115.1 nm and 161.2 nm,respectively. Nanometric cutting experiment was carried out on single-crystal copper and silicon by using diamond tool with straight edge. The experimental result indicates that the developed nanometric cutting device enables nanoscale mate-rial removal behavior to be achieved with online high-resolution observation.