CAJ | 학술논문

利用化学溶液沉积法在Pt/Ti/SiO2/Si (100)基底和700℃条件下分别制备了Nd和Mg (不同浓度)共掺杂的钛酸铋薄膜Bi3．15Nd0．85Ti(3-x)Mg2xO12(BNTM)(x=0．00,0．06,0．10和0．14),并进行了这一系列薄膜的包括微结构、介电、铁电和漏电流等特性的研究和对比。发现当Mg含量为x=0．10时,薄膜具有较高的剩余极化强度(2Pr=33．40μC/cm2)和介电常数(ε=538,频率为1kHz),其漏电流密度为10-8A/cm2。讨论了相关的物理机制。
이용화학용액침적법재Pt/Ti/SiO2/Si (100)기저화700℃조건하분별제비료Nd화Mg (불동농도)공참잡적태산필박막Bi3．15Nd0．85Ti(3-x)Mg2xO12(BNTM)(x=0．00,0．06,0．10화0．14),병진행료저일계렬박막적포괄미결구、개전、철전화루전류등특성적연구화대비。발현당Mg함량위x=0．10시,박막구유교고적잉여겁화강도(2Pr=33．40μC/cm2)화개전상수(ε=538,빈솔위1kHz),기루전류밀도위10-8A/cm2。토론료상관적물리궤제。
A series of Nd and Mg cosubstituted bismuth titanate films of Bi3. 15 Nd0. 85 Ti(3-x) Mg2x O12 ( x=0. 00, 0. 06,0. 10 and 0. 14)have been prepared on Pt/Ti/SiO2/Si(100)substrates at 700℃ by a chemical solution depo-sition technique,respectively. The structural evolution and ferroelectric properties of the as-deposited films were systematically investigated as a function of Mg composition x. It was found that an optimized Mg content,x=0. 10, can greatly enhance the remnant polarization(2Pr=33. 40μC/cm2)and the dielectric constants(ε=538 at the fre-quency of 1kHz)of the as-deposited films,while the leakage current was 10 -8A/cm2. The relevant physical mecha-nisms were discussed.