CAJ | 학술논문

太阳能集热器是太阳能热水器的核心部件，平板集热器可以作为建筑材料与建筑完美融合，满足城市对太阳能的利用与建筑一体化的要求．本论文用中频磁控溅射技术制备用于平板集热器的 Ti-O-N 选择性吸收涂层．用 XRD、SEM 及红外反射测试研究工艺参数对吸收涂层结晶质量、形貌及反射率的影响．设置镀膜过程中气压分别为0．8 Pa、1．2 Pa 和2．0 Pa 而其他参数不变，制备出不同气压条件下的 Ti-O-N 选择性吸收涂层，通过分析样品的表面形貌及红外反射率来研究镀膜过程中气压对涂层质量的影响．实验表明，气压越低，所镀的薄膜颗粒越致密均匀，薄膜表面越光滑，薄膜的集热效率越高，即涂层的质量越好．
태양능집열기시태양능열수기적핵심부건，평판집열기가이작위건축재료여건축완미융합，만족성시대태양능적이용여건축일체화적요구．본논문용중빈자공천사기술제비용우평판집열기적 Ti-O-N 선택성흡수도층．용 XRD、SEM 급홍외반사측시연구공예삼수대흡수도층결정질량、형모급반사솔적영향．설치도막과정중기압분별위0．8 Pa、1．2 Pa 화2．0 Pa 이기타삼수불변，제비출불동기압조건하적 Ti-O-N 선택성흡수도층，통과분석양품적표면형모급홍외반사솔래연구도막과정중기압대도층질량적영향．실험표명，기압월저，소도적박막과립월치밀균균，박막표면월광활，박막적집열효솔월고，즉도층적질량월호．
Abstracts:Solar collector is the core component of the solar water heater.China's vacuum tube collec-tor has the advantages of high efficiency and low price,however,has disadvantage of detrimental to the appearance of the building.China's flat-plate collector has shortcomings of backward technology and low efficiency,but it can be used as building material to build the perfect fusion,can meet the requirements of the city on the use of solar energy and building integrated.This paper is to study the production technolo-gy of the flat-plate collector Ti-O-N selective absorption coating.Doing three experiments by Medium Frequency Magnetron sputtering system,with coating process air pressure of 0.8 Pa,1.2 Pa and 2.0 Pa, while the other parameters unchanged,produce three Ti-O-N selective absorbing coating.How the air pressure affects the quality of the coating can be knew by analyzing the samples'surface morphology and in-frared reflectivity.The experiments show that with the decreasing of total gas pressure,the film particles became more compact and surface is more smooth,and therefore the higher the collection efficiency of the film,that is,the better the quality of the coating.