真空与低温
真空與低溫
진공여저온
VACUUM AND CRYOGENICS
2015年
1期
38-41
,共4页
杨建平%陈学康%吴敢%王瑞
楊建平%陳學康%吳敢%王瑞
양건평%진학강%오감%왕서
激光刻蚀%能量密度分布%衍射元件%光束整形
激光刻蝕%能量密度分佈%衍射元件%光束整形
격광각식%능량밀도분포%연사원건%광속정형
laser ablation%distribution of power density%diffraction optical component%laser beam shaping
针对碳纤维复合材料基底上的金属薄膜图形刻蚀需求，研究了一种基于光学波前衍射变换原理的能量/激光功率密度分布整形方法，并设计制作了衍射元件。利用基模（TEM00）和非基模输出的红外激光分别进行了验证实验，用整形后的激光光束进行刻蚀，金属薄膜被完全去除，刻蚀边界锋锐整齐，基底没有可见的损伤。衍射元件对于基模模式输出激光的转换效率为71%，对非基模模式的转换效率为53%。
針對碳纖維複閤材料基底上的金屬薄膜圖形刻蝕需求，研究瞭一種基于光學波前衍射變換原理的能量/激光功率密度分佈整形方法，併設計製作瞭衍射元件。利用基模（TEM00）和非基模輸齣的紅外激光分彆進行瞭驗證實驗，用整形後的激光光束進行刻蝕，金屬薄膜被完全去除，刻蝕邊界鋒銳整齊，基底沒有可見的損傷。衍射元件對于基模模式輸齣激光的轉換效率為71%，對非基模模式的轉換效率為53%。
침대탄섬유복합재료기저상적금속박막도형각식수구，연구료일충기우광학파전연사변환원리적능량/격광공솔밀도분포정형방법，병설계제작료연사원건。이용기모（TEM00）화비기모수출적홍외격광분별진행료험증실험，용정형후적격광광속진행각식，금속박막피완전거제，각식변계봉예정제，기저몰유가견적손상。연사원건대우기모모식수출격광적전환효솔위71%，대비기모모식적전환효솔위53%。
Laser ablation result is related to the distribution of laser power density,especially for metal film ablation. A method of shaping laser power density distribution based on wave front diffraction transform was described in this pa-per,and a Laser optical diffraction component was designed and fabricated using this method. Verification experiment of laser power shaping ability was carried out using initial phase(TEM00)and multi phase laser,and the result indicated that both of the original laser beams were transformed by employing diffractive optical component. Conversion efficiency of diffractive optical component is 71%for initial phase condition,and 53%for multi phase.
