CAJ | 학술논문

研究了不同通氧量对电子束蒸发沉积二氧化钛薄膜的光学性能影响。随着氧气流量从37.4×10-3 Pa·m3·s-1增加到61.2×10-3 Pa·m3·s-1，真空室的真空度从1.4×10-3 Pa变化到2.5×10-3 Pa，可以得到不同光学性能的二氧化钛薄膜。采用分光光度计测试其光谱，结果发现TiO2薄膜的透射率峰值随着真空度降低而增大，折射率和消光系数随真空度降低先升高后降低。在真空度2.0×10-3 Pa的工艺条件下，成膜质量最优，透射率为92％，折射率在2.50～2.20之间，消光系数在10-4以下。根据Cauchy方程拟合其色散规律，拟合曲线和采用包络法计算得到的曲线较好重合，折射率随波长的变化公式为n（λ）=2.17+6.12×104/λ2+2.98×108/λ4。
연구료불동통양량대전자속증발침적이양화태박막적광학성능영향。수착양기류량종37.4×10-3 Pa·m3·s-1증가도61.2×10-3 Pa·m3·s-1，진공실적진공도종1.4×10-3 Pa변화도2.5×10-3 Pa，가이득도불동광학성능적이양화태박막。채용분광광도계측시기광보，결과발현TiO2박막적투사솔봉치수착진공도강저이증대，절사솔화소광계수수진공도강저선승고후강저。재진공도2.0×10-3 Pa적공예조건하，성막질량최우，투사솔위92％，절사솔재2.50～2.20지간，소광계수재10-4이하。근거Cauchy방정의합기색산규률，의합곡선화채용포락법계산득도적곡선교호중합，절사솔수파장적변화공식위n（λ）=2.17+6.12×104/λ2+2.98×108/λ4。
The optical properties of TiO2 thin film deposited by electron beam evaporation with different oxygen flux were studied. When the oxygen flux from 37.4×10-3 Pa·m3·s-1 to 61.2×10-3 Pa·m3·s-1,vacuum degree was rising from 1.4×10-3 Pa to 2.5×10-3 Pa,the different optical properties will gain from TiO2 thin film. Spectrophotometer was used to test spectrum,when the vacuum degree decreased,it was found that peak value transmittance of TiO2 has increased. The refractive index and extinction coefficient increased first and then decreased. Under vacuum degree of 2.0×10-3 Pa ,the best TiO2 thin film quality,the peak value transmittance was 92%,the refractive index changed from 2.50 to 2.20. The extinc-tion coefficient was below 10-4. By-use Cauchy chromatic dispersion formula. The fitting curve accorded well with the re-sult by the envelope method. Refractive index changing with the wavelength formula is n(λ)=2.17+6.12×104/λ2+2.98×108/λ4.