当代化工
噹代化工
당대화공
CONTEMPORARY CHEMICAL INDUSTRY
2015年
2期
301-304
,共4页
三氯氢硅烷%流化床%粒状多晶硅
三氯氫硅烷%流化床%粒狀多晶硅
삼록경규완%류화상%립상다정규
SiHCl3%Fluidized bed reactor%Granular polysilicon
综述了近年来关于三氯氢硅（SiHCl3）流化床制备颗粒状多晶硅工艺技术研究状况，详细介绍了国内外关于颗粒状多晶硅制备流化床设备的设计思路及制备情况，并讨论了反应器制备方法对产品纯度的影响，分析了“热壁流化床”的技术缺陷，“冷壁流化床”的技术优势，对下一步流化床技术发展进行了展望。
綜述瞭近年來關于三氯氫硅（SiHCl3）流化床製備顆粒狀多晶硅工藝技術研究狀況，詳細介紹瞭國內外關于顆粒狀多晶硅製備流化床設備的設計思路及製備情況，併討論瞭反應器製備方法對產品純度的影響，分析瞭“熱壁流化床”的技術缺陷，“冷壁流化床”的技術優勢，對下一步流化床技術髮展進行瞭展望。
종술료근년래관우삼록경규（SiHCl3）류화상제비과립상다정규공예기술연구상황，상세개소료국내외관우과립상다정규제비류화상설비적설계사로급제비정황，병토론료반응기제비방법대산품순도적영향，분석료“열벽류화상”적기술결함，“랭벽류화상”적기술우세，대하일보류화상기술발전진행료전망。
Recent research status of granular polysilicon preparation technology with SiHCl3 fluidized bed was reviewed. The design ideas and development status of fluidized bed reactor for granular polysilicon preparation were introduced in detail. The influence of reactor preparation methods on the product purity was also discussed. Technical defects of "hot wall fluidized bed" were analyzed as well as advantages of "cold wall fluidized bed". Finally, development trend of the fluidized bed technology was prospected.
