CAJ | 학술논문

在对氩离子抛光页岩样品的扫描电镜分析过程中，对比了镀膜与不镀膜方式的优缺点。结果显示：镀膜能够显著减轻荷电现象，而不镀膜方式能更好地获得页岩内部，特别是微孔隙结构的真实信息。在对分析条件，包括加速电压、检测器的选择及扫描速度等进行优化后，不镀膜方式也能获得荷电较少，细节清晰的抛光页岩扫描电镜图片。此外，不镀膜方式在页岩的电镜分析中具有更广的应用前景，如聚焦离子束（ focus ion beam， FIB）－扫描电镜能够分析获取页岩的三维孔隙结构。
재대아리자포광혈암양품적소묘전경분석과정중，대비료도막여불도막방식적우결점。결과현시：도막능구현저감경하전현상，이불도막방식능경호지획득혈암내부，특별시미공극결구적진실신식。재대분석조건，포괄가속전압、검측기적선택급소묘속도등진행우화후，불도막방식야능획득하전교소，세절청석적포광혈암소묘전경도편。차외，불도막방식재혈암적전경분석중구유경엄적응용전경，여취초리자속（ focus ion beam， FIB）－소묘전경능구분석획취혈암적삼유공극결구。
Two methods including coating and uncoating are compared in SEM ( scanning electron microscopy ) analysis of shale samples polished by argon ion beam. The result shows that coating process can reduce charging phenomena remarkably, while images with uncoating way can provide more real information about shale, especially the micropores structure in nano?scale. After optimizing the analysis conditions, including acceleration voltage, detectors, scanning speed, clear SEM images of polished shale samples with less charge can be obtained in uncoating way. Meanwhile, the uncoating way can be used in shale analysis more widely, such as FIB?SEM that can analyze 3-dimension structure of micropores.