CAJ | 학술논문

利用热丝化学气相沉积法(HFCVD),固定其他工艺参数,通过改变沉积功率在 YG6硬质合金上制备金刚石涂层,并利用扫描电镜(SEM)、洛氏硬度计和 Raman 光谱对涂层进行性能测试。结果表明：两步法处理硬质合金基体,可以有效去除表层的Co,同时增大表面粗糙度,提高金刚石形核率,提高涂层附着力；涂层表面形貌观察可知,沉积功率4 kW时,晶形完整,晶粒大小非常均匀致密,晶面主要呈现金刚石典型的(111)面生长；压痕测试表明,当功率为4 kW 时,涂层的结合力最好,表面均匀、平整；结合Raman 光谱分析,功率4 kW时,涂层质量很好。
이용열사화학기상침적법(HFCVD),고정기타공예삼수,통과개변침적공솔재 YG6경질합금상제비금강석도층,병이용소묘전경(SEM)、락씨경도계화 Raman 광보대도층진행성능측시。결과표명：량보법처리경질합금기체,가이유효거제표층적Co,동시증대표면조조도,제고금강석형핵솔,제고도층부착력；도층표면형모관찰가지,침적공솔4 kW시,정형완정,정립대소비상균균치밀,정면주요정현금강석전형적(111)면생장；압흔측시표명,당공솔위4 kW 시,도층적결합력최호,표면균균、평정；결합Raman 광보분석,공솔4 kW시,도층질량흔호。
Hot filament chemical vapor deposition(HFCVD) method was used to deposit diamond coating on YG6 cemented carbide,by changing the deposition power and fixing the other process parameters.Scanning electron microscopy (SEM),Rockwell hardness tester and Raman spectroscopy were used to evaluate the properties of the diamond coatings.Results showed that the two-step pretreatment could effectively remove the surface Co of cemented carbide substrates,increase the surface roughness,improve the diamond nucleation rate and coating adhesion.Coating surface morphology observed by SEM showed that the crystal shape was integrated with uniform grain size, mainly a typical(111)surface when deposition power was 4 kW.The indentation tests showed that the adhesion strength was best with smooth surface when deposition power was 4 kW.Combined with the Raman spectroscopy analysis,the coating quality was very well.