CAJ | 학술논문

建立了微陀螺的动力学模型，采用多尺度方法对微陀螺的非线性模型进行求解，探讨了驱动微弹性梁和检测微弹性梁的非线性刚度对微陀螺输出的影响规律，研究了微陀螺的带宽在非线性刚度作用下的设计原则，结果表明：微陀螺振动系统的检测灵敏度和带宽呈反比关系；微弹性梁的非线性刚度会使得输入角速度与检测输出呈非线性关系。因此，从微弹性梁的设计角度出发，可根据较大的输出或者较小的非线性要求选取合适的驱动微弹性梁；而检测微弹性梁则需要选取较小的非线性刚度。
건립료미타라적동역학모형，채용다척도방법대미타라적비선성모형진행구해，탐토료구동미탄성량화검측미탄성량적비선성강도대미타라수출적영향규률，연구료미타라적대관재비선성강도작용하적설계원칙，결과표명：미타라진동계통적검측령민도화대관정반비관계；미탄성량적비선성강도회사득수입각속도여검측수출정비선성관계。인차，종미탄성량적설계각도출발，가근거교대적수출혹자교소적비선성요구선취합괄적구동미탄성량；이검측미탄성량칙수요선취교소적비선성강도。
Here,a dynamic model of a microgyroscope was built,a multi-scale method was used to solve the nonlinear model of the microgyroscope.The effects of nonlinear stiffnesses of a driving mirco elastic beam and a sensing mirco elastic beam on the output of the microgyroscope were studied.The design principles for the frequency bandwidth of the mirco-gyroscope with nonliear stiffnesses were studied.The results showed that for the vibration system of the microgyroscope,its detection sensitivity is inversely proportional to its frequency bandwidth;the input angular velocity has a nonlinear relationship with the detection output due to the nonlinear stiffnesses of mircromachined elastic beams of the microgyroscope;therefore,in the view of the design of mirco elastic beams,an appropriate driving micro elastic beam is selected according to the larger output or smaller nonlinear requirements;the sensing mirco elastic beam needs to choose a smaller nonlinear stiffness.