原子能科学技术
原子能科學技術
원자능과학기술
ATOMIC ENERGY SCIENCE AND TECHNOLOGY
2015年
2期
336-342
,共7页
孙立杰%林承键%杨峰%郭昭乔%郭天舒%徐新星%包鹏飞%杨磊%贾会明%马南茹%张焕乔%刘祖华%夏清良
孫立傑%林承鍵%楊峰%郭昭喬%郭天舒%徐新星%包鵬飛%楊磊%賈會明%馬南茹%張煥喬%劉祖華%夏清良
손립걸%림승건%양봉%곽소교%곽천서%서신성%포붕비%양뢰%가회명%마남여%장환교%류조화%하청량
双面硅条探测器%微电子工艺%电气特性%探测特性%条间串扰
雙麵硅條探測器%微電子工藝%電氣特性%探測特性%條間串擾
쌍면규조탐측기%미전자공예%전기특성%탐측특성%조간천우
double-sided silicon strip detector%microelectronic technique%electronic performance%detection performance%crosstalk
研制了双面硅条探测器。探测器灵敏面积为48 mm ×48 mm ，厚约300μm ，结面和欧姆面的硅条互相垂直，均由相互平行、宽度相等的48条组成，每条宽0.9 mm、间距0.1 mm。对其电气特性（耗尽偏压、反向漏电流、条间电阻）和探测特性（上升时间、能量分辨、条间串扰）进行了测试。在偏压为－15 V时，各条平均反向漏电流小于10 nA。对于从结面入射的5.157 M eV的α粒子，前放信号上升时间约45 ns ，结面各条的能量分辨率约0.6％～0.7％，基本无条间串扰；欧姆面各条能量分辨率较差，存在条间串扰。
研製瞭雙麵硅條探測器。探測器靈敏麵積為48 mm ×48 mm ，厚約300μm ，結麵和歐姆麵的硅條互相垂直，均由相互平行、寬度相等的48條組成，每條寬0.9 mm、間距0.1 mm。對其電氣特性（耗儘偏壓、反嚮漏電流、條間電阻）和探測特性（上升時間、能量分辨、條間串擾）進行瞭測試。在偏壓為－15 V時，各條平均反嚮漏電流小于10 nA。對于從結麵入射的5.157 M eV的α粒子，前放信號上升時間約45 ns ，結麵各條的能量分辨率約0.6％～0.7％，基本無條間串擾；歐姆麵各條能量分辨率較差，存在條間串擾。
연제료쌍면규조탐측기。탐측기령민면적위48 mm ×48 mm ，후약300μm ，결면화구모면적규조호상수직，균유상호평행、관도상등적48조조성，매조관0.9 mm、간거0.1 mm。대기전기특성（모진편압、반향루전류、조간전조）화탐측특성（상승시간、능량분변、조간천우）진행료측시。재편압위－15 V시，각조평균반향루전류소우10 nA。대우종결면입사적5.157 M eV적α입자，전방신호상승시간약45 ns ，결면각조적능량분변솔약0.6％～0.7％，기본무조간천우；구모면각조능량분변솔교차，존재조간천우。
The double‐sided silicon strip detector (DSSD) was developed .The detector’s sensitive area is 48 mm × 48 mm and the thickness is about 300 μm .Both of two sides surfaces are divided into equal 48 strips with width of 0.9 mm by oxide separation of 0.1 mm .The electronic performance (full depletion bias voltage ,reverse leakage cur‐rent and interstrip resistance ) and detection performance (rise time ,energy resolution and crosstalk) were tested .The reverse leakage current of each strip is less than 10 nA , and the rise time of preamplifiers for 5.157 MeV α particles is about 45 ns under bias voltage of -15 V .T he junction side strips display an energy resolution of 0.6%‐0.7%whereas the ohmic side strips show an unsatisfactory resolution .The crosstalk between neighboring strips is negligible on the junction side but interferes with each strip on the ohmic side .
