CAJ | 학술논문

针对光栅尺具有断电位置复位、无累计误差、高精度优点，在光学隔振平台上分别建立开放式和封闭式绝对光栅尺实验系统，绝对光栅尺采用图像识别原理，以气浮直线电机ArotechABL1500为参考对象，使用激光干涉仪RENISHAW XL‐80校核精度，研究不同结构绝对光栅尺的误码特点及原因。通过对比实验及研究分析，表明封闭式绝对尺相对于开放式绝对尺的误码率要高，开放式绝对式光栅尺的误码率为3％，封闭式绝对式光栅尺的误码率为8％。
침대광책척구유단전위치복위、무루계오차、고정도우점，재광학격진평태상분별건립개방식화봉폐식절대광책척실험계통，절대광책척채용도상식별원리，이기부직선전궤ArotechABL1500위삼고대상，사용격광간섭의RENISHAW XL‐80교핵정도，연구불동결구절대광책척적오마특점급원인。통과대비실험급연구분석，표명봉폐식절대척상대우개방식절대척적오마솔요고，개방식절대식광책척적오마솔위3％，봉폐식절대식광책척적오마솔위8％。
Aiming at the advantages of grating scale has that it can set reset for power outage , has no cumulative error with high accuracy ,we established the unsealed and sealed absolute grating experimental systems respectively by using the technology of image identification on the optical vibration isolation platform .Taking the air bearing linear motor ArotechABL1500 for reference ,we checked its accuracy by the laser interferometer RENISHAW XL‐80 ,and an‐alyzed the characters and the causes of the bit errors of different‐structure absolute grating scale .By the contrast experiment and the analysis ,it is proved that the bit error rate of the sealed absolute ruler is higher than that of unsealed ,the bit error rate of the sealed absolute ruler is 3% w hile the unsealed one is 8% .