CAJ | 학술논문

研究并制作了以钇铝石榴石（YAG）透明陶瓷为基底材料的衍射光栅元件。通过磁控溅射技术在YAG透明陶瓷表面溅射一层均匀致密的金属铬，获得带有硬掩模的陶瓷样品。借助接触式曝光系统进行光刻，反复试验，获得带有衍射光栅的YAG透明陶瓷样品。经光学轮廓仪检测，样品铬膜厚0．072μm ，光栅细节得到完好保留。实际光栅的衍射图样再次验证了以Y A G透明陶瓷代替传统微光刻基底材料制作衍射光栅的可行性，使得衍射光栅在更为复杂的环境下发挥作用成为可能。
연구병제작료이을려석류석（YAG）투명도자위기저재료적연사광책원건。통과자공천사기술재YAG투명도자표면천사일층균균치밀적금속락，획득대유경엄모적도자양품。차조접촉식폭광계통진행광각，반복시험，획득대유연사광책적YAG투명도자양품。경광학륜곽의검측，양품락막후0．072μm ，광책세절득도완호보류。실제광책적연사도양재차험증료이Y A G투명도자대체전통미광각기저재료제작연사광책적가행성，사득연사광책재경위복잡적배경하발휘작용성위가능。
Diffractive grating element based on yttrium aluminum garnet (YAG) transparent ce‐ramics substrate was fabricated and researched .A uniform dense metal chrome film was depos‐ited on YAG transparent ceramics by direct current(DC) reactive magnetron sputtering .The YAG transparent ceramics with hard mask were obtained .The photolithography was accom‐plished by contact UV‐lithography system ,and the YAG transparent ceramics sample with dif‐fractive grating was obtained by trial and error .Testing results show the thickness of chrome film is 0 .072μm by optical profiler ,the details of diffractive grating in the sample are remained perfectly .The feasibility of fabricating diffractive grating by substituting YAG transparent ce‐ramics for traditional photolithography substrate has also been proved by the diffraction pat‐tern of this grating .It is concluded that this research makes possible to use diffractive grating in a more complex environment and has broad prospects in application .