CAJ | 학술논문

混频器是太赫兹器件中传输信号的基本元件，具有重要的研究价值。介绍了一种以MEMS工艺为基础的新型的太赫兹混频器设计和加工工艺。该太赫兹混频器采用具有高介电常数SU-8光刻胶作为介质层，然后在SU-8胶介质层上进行光刻、电镀微带线，实现了采用正负胶结合的牺牲层工艺加工制作出了太赫兹混频器。
혼빈기시태혁자기건중전수신호적기본원건，구유중요적연구개치。개소료일충이MEMS공예위기출적신형적태혁자혼빈기설계화가공공예。해태혁자혼빈기채용구유고개전상수SU-8광각효작위개질층，연후재SU-8효개질층상진행광각、전도미대선，실현료채용정부효결합적희생층공예가공제작출료태혁자혼빈기。
Mixer is a basic RF device for signal transportation and has potential applications in many fields. A novel sub-millimeter mixer device based on MEMS technology has been designed and fabricated. In this design,SU-8 pho-toresist which has a high dielectric constant,was used as the dielectric layer of the device. The subsequent proces-ses,such as photolithography,electroplating of micro-strip etc.,were carried out on SU-8 dielectric layer. By using positive-and negative photoresist sacrifical process,a novel sub-millimeter mixer was demonstrated.