传感技术学报
傳感技術學報
전감기술학보
Journal of Transduction Technology
2015年
1期
39-42
,共4页
MEMS%加速度计%温度补偿%最小二乘法
MEMS%加速度計%溫度補償%最小二乘法
MEMS%가속도계%온도보상%최소이승법
MEMS%accelerometer%temperature compensation%least square method
为降低环境温度对加速度计测量输出的影响,本文提出了一种新的加速度计温度补偿方法,即三维拟合曲面和计算的补偿方法。本文详细介绍了该温度补偿方法的具体原理和实现方法,并用实验进行了验证,实验结果表明加速度计最大零位漂移由温度补偿前的500 mV缩小为温度补偿后的50 mV,即温漂缩小了一个数量级,补偿效果明显。
為降低環境溫度對加速度計測量輸齣的影響,本文提齣瞭一種新的加速度計溫度補償方法,即三維擬閤麯麵和計算的補償方法。本文詳細介紹瞭該溫度補償方法的具體原理和實現方法,併用實驗進行瞭驗證,實驗結果錶明加速度計最大零位漂移由溫度補償前的500 mV縮小為溫度補償後的50 mV,即溫漂縮小瞭一箇數量級,補償效果明顯。
위강저배경온도대가속도계측량수출적영향,본문제출료일충신적가속도계온도보상방법,즉삼유의합곡면화계산적보상방법。본문상세개소료해온도보상방법적구체원리화실현방법,병용실험진행료험증,실험결과표명가속도계최대령위표이유온도보상전적500 mV축소위온도보상후적50 mV,즉온표축소료일개수량급,보상효과명현。
In order to decrease the impact of temperature on accelerometer,a novel method of temperature compen-sation for accelerometer is proposed. That is three-dimensional fit curved surface and computing method. The princi-ple and method of realization of this temperature compensation is presented in detail. It is verified by practical ex-amples. It has been shown that the biggest zero temperature drift of accelerometer has been reduced from 500 mV to 50 mV which is the value after temperature compensation. That is the temperature drift narrows down an order of magnitude. The accelerometer output has a significant improvement.