CAJ | 학술논문

AFM( Atomic Force Microscope,原子力显微镜)中的压电陶瓷驱动器具有率相关迟滞非线性特性,这会影响AFM的扫描和定位精度。针对传统静态迟滞模型不能反映系统率相关动态迟滞特性的缺陷,提出Hammerstein模型以描述压电陶瓷驱动器的静态和动态迟滞特性。利用最小二乘支持向量机结合奇异值分解法对模型中的参数进行辨识。实验结果表明,模型能体现压电陶瓷驱动器的率相关迟滞特性,精度高于传统静态迟滞模型,建模方法对此类系统具有较好的应用价值。
AFM( Atomic Force Microscope,원자력현미경)중적압전도자구동기구유솔상관지체비선성특성,저회영향AFM적소묘화정위정도。침대전통정태지체모형불능반영계통솔상관동태지체특성적결함,제출Hammerstein모형이묘술압전도자구동기적정태화동태지체특성。이용최소이승지지향량궤결합기이치분해법대모형중적삼수진행변식。실험결과표명,모형능체현압전도자구동기적솔상관지체특성,정도고우전통정태지체모형,건모방법대차류계통구유교호적응용개치。
The piezoelectric actuator( PEA) used in the Atomic Force Microscopy( AFM) possesses a feature of rate-dependent hysteresis,which have a negative influence on the scanning and positioning accuracy of AFM. As the tra-ditional static nonlinear hysteresis model can’t reflect the dynamic frequency characteristics of the system,a Ham-merstein model here is proposed to describe the static and dynamic hysteresis characteristics of the PEA. The pa-rameters of the model is identified by the least squares support vector machine( LS-SVM) algorithm and the singular value decomposition( SVM) method. The experiment result indicates that the rate-dependent hysteresis is well reflec-ted,and the model accuracy is better than the traditional static hysteresis model,its application value is desirable for the analogous systems.