CAJ | 학술논문

利用HFSS仿真软件对一种基于电感耦合的新型磁芯螺线管微电感进行设计,并优化得出其结构参数,该电感尺寸为7 mm×6.6 mm×0.44 mm。利用Agilent E4294A射频阻抗/材料分析仪对微机电系统(MEMS)工艺实现的该新型螺线管微电感进行了性能测试分析。测试结果表明：该电感在1 MHz~20 MHz频率范围内保持较高的电感值和品质因数Q,测试结果与仿真结果较好的吻合,电感值是相同几何结构参数下空心电感的16倍以上,在10 MHz频率时,微电感的电感值为1.17μH,Q值达到50。
이용HFSS방진연건대일충기우전감우합적신형자심라선관미전감진행설계,병우화득출기결구삼수,해전감척촌위7 mm×6.6 mm×0.44 mm。이용Agilent E4294A사빈조항/재료분석의대미궤전계통(MEMS)공예실현적해신형라선관미전감진행료성능측시분석。측시결과표명：해전감재1 MHz~20 MHz빈솔범위내보지교고적전감치화품질인수Q,측시결과여방진결과교호적문합,전감치시상동궤하결구삼수하공심전감적16배이상,재10 MHz빈솔시,미전감적전감치위1.17μH,Q치체도50。
A novel solenoid microinductor with a magnetic core,which is based on inductive coupling,has been de-signed using High Frequency Structure Simulator(Ansoft HFSSTM),and the optimized geometrical structure parameters are obained,the length,width and thickness of the inductor are 7 mm,6.6 mm and 0.44 mm respectively. The perform-ance of the novel solenoid microinductor,which has been fabricated by a micro-electro mechanical system( MEMS) process,has been characterized and analyzed using the Aglient E4294A RF impedance/material analyzer. From the measurement results that the high performance of inductance( L) and its quality factor( Q) are obtained from 1 MHz to 20 MHz,which agree well with the simulation results. Besides,the L value is more than 16 times than that of a hollow inductor with the same geometrical parameters. At 10 MHz,the L value is 1.17μH,and the Q value is more than 50.