中国光学
中國光學
중국광학
CHINESE JOURNAL OF OPTICS
2015年
1期
84-90
,共7页
聂山钧%郭劲%邵俊峰%王挺峰%汤伟
聶山鈞%郭勁%邵俊峰%王挺峰%湯偉
섭산균%곽경%소준봉%왕정봉%탕위
热固耦合%热变形%哈特曼传感器
熱固耦閤%熱變形%哈特曼傳感器
열고우합%열변형%합특만전감기
thermal-structural coupling%thermal deformation%Hartmann wavefront sensor
为了分析激光辐照下反射镜热变形对光束质量的影响,本文建立了激光光束45°角入射时镀铬介质高吸收镜的热固耦合模型,对不同辐照光束下反射镜的热变形和镜体厚度对热变形的影响进行了分析,并用哈特曼波前传感器对自由边界条件下的镜面热变形进行了检测。结果表明:吸收功率在0.085~0.185 W时,镜面热变形随吸收功率的增加近似线性增加,随辐照光斑的增加而减小;反射镜厚度在1~5 mm范围,镜面热变形基本不变。在激光照射的初始阶段,反射镜表面温度和热变形迅速增加,在激光连续照射20 s后,镜面温度增加量逐步变缓,镜面热变形则在1 s以内就上升至0.27μm,之后变形量缓慢增加,在100 s后达到相对稳定状态;关闭激光后,镜面在120 s后恢复到初始状态。分析表明,产生误差的因素主要为光斑大小和辐照光束入射角度。
為瞭分析激光輻照下反射鏡熱變形對光束質量的影響,本文建立瞭激光光束45°角入射時鍍鉻介質高吸收鏡的熱固耦閤模型,對不同輻照光束下反射鏡的熱變形和鏡體厚度對熱變形的影響進行瞭分析,併用哈特曼波前傳感器對自由邊界條件下的鏡麵熱變形進行瞭檢測。結果錶明:吸收功率在0.085~0.185 W時,鏡麵熱變形隨吸收功率的增加近似線性增加,隨輻照光斑的增加而減小;反射鏡厚度在1~5 mm範圍,鏡麵熱變形基本不變。在激光照射的初始階段,反射鏡錶麵溫度和熱變形迅速增加,在激光連續照射20 s後,鏡麵溫度增加量逐步變緩,鏡麵熱變形則在1 s以內就上升至0.27μm,之後變形量緩慢增加,在100 s後達到相對穩定狀態;關閉激光後,鏡麵在120 s後恢複到初始狀態。分析錶明,產生誤差的因素主要為光斑大小和輻照光束入射角度。
위료분석격광복조하반사경열변형대광속질량적영향,본문건립료격광광속45°각입사시도락개질고흡수경적열고우합모형,대불동복조광속하반사경적열변형화경체후도대열변형적영향진행료분석,병용합특만파전전감기대자유변계조건하적경면열변형진행료검측。결과표명:흡수공솔재0.085~0.185 W시,경면열변형수흡수공솔적증가근사선성증가,수복조광반적증가이감소;반사경후도재1~5 mm범위,경면열변형기본불변。재격광조사적초시계단,반사경표면온도화열변형신속증가,재격광련속조사20 s후,경면온도증가량축보변완,경면열변형칙재1 s이내취상승지0.27μm,지후변형량완만증가,재100 s후체도상대은정상태;관폐격광후,경면재120 s후회복도초시상태。분석표명,산생오차적인소주요위광반대소화복조광속입사각도。
In order to analyze the effect of thermal deformation of the mirror irradiated by laser beam on the beam quality , thermal-static structural coupled model of high absorption chrome plated mirror irradiated by la-ser beam with the incidence angle of 45°is built.Thermal deformation under different irradiation laser and the influence of mirror thickness on the deformation are analyzed .Then thermal deformation is detected with Hart-mann wavefront sensor on free boundary condition .The results show that thermal deformation increases approx-imately linearly with the increase of the power absorbed at the range of 0.085-0.185 W.When the diameter of the facula increases , the deformation decreases .When mirror's thickness keeps in the range of 1~5 mm, the deformation merely keeps constant .In the initial stage of laser irradiation , the temperature and deformation increase rapidly .After 20 s, the increase of temperature on the mirror becomes slowly .The deformation in-creases to 0.27 μm in 1 s, and then increase slowly .The deformation will reach balance after 100 s.When the irradiation laser is removed , the mirror will return to the initial state after 120 s.The analysis result shows that the testing error is mainly caused by the error of the diameter of the facula and the incident angle of the la -ser .