太阳选择性吸收涂层系列讲座(18)空心阴极气流溅射法沉积Al掺杂ZnO膜的电学与光学性质(下)
태양선택성흡수도층계렬강좌(18)공심음겁기류천사법침적Al참잡ZnO막적전학여광학성질(하)
Electeical and optical properties of Al-doped ZnO films deposited by hollow cathode gas flow sputtering
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