CAJ | 학술논문

用干湿法结合工艺和等静压成型制备多层片式电感(MLCI)。等静压成型较传统的热压成型相比，可以明显提高器件的致密度以及密度均匀性，然而等静压成型压力对于产品的影响却是复杂的。压力过小，产品易出现分层开裂，压力过大则会造成切割线错位以及内电极短路等影响。分析了待切割巴块切割线错位度与等静压压力之间的关系并提出了改进方法。另外，实验也发现了内电极短路率与等静压压力之间的关系，通过实验验证，给出了制造MLCI合理的成型压力范围为4~8MPa。
용간습법결합공예화등정압성형제비다층편식전감(MLCI)。등정압성형교전통적열압성형상비，가이명현제고기건적치밀도이급밀도균균성，연이등정압성형압력대우산품적영향각시복잡적。압력과소，산품역출현분층개렬，압력과대칙회조성절할선착위이급내전겁단로등영향。분석료대절할파괴절할선착위도여등정압압력지간적관계병제출료개진방법。령외，실험야발현료내전겁단로솔여등정압압력지간적관계，통과실험험증，급출료제조MLCI합리적성형압력범위위4~8MPa。
Multilayer chip inductor (MLCI) is prepared by dry-wet methods combining isostatic pressing. Compared with traditional hot pressing molding, isostatic pressing molding can obviously improve the density of products and density uniformity. However, the influence of isostatic pressing pressure on the product is complicated, The product is easy to appear cracking if the pressure is too small. Oppositely, excessive pressure can cause cutting line dislocation and inner electrode short circuit. This paper analyzed the relationship between pressure and the level of cutting line dislocation, and put forward some methods for improvement. What’s more, the experiments also find the relationship between isostatic pressing pressure and inner electrode shortcut rate. Finally the proper range of molding pressure from 4MPa to 8MPa which can be used for manufacturing MLCI is proposed after verification.