CAJ | 학술논문

采用化学液相沉积工艺（RCLD），在碳材料表面快速附着一层结合紧密、致密均匀的硅化物涂层，研究了不同直径的预制体表面处理以及电压和电流等对碳材料外部硅化物层结构和性能的影响。结果表明，经王水腐蚀的石墨表面粗糙化，有利于沉积层的生成和附着；预制体的直径为7mm、电压为52V、电流为60A时的抗氧化沉积层具有较好的性能。
채용화학액상침적공예（RCLD），재탄재료표면쾌속부착일층결합긴밀、치밀균균적규화물도층，연구료불동직경적예제체표면처리이급전압화전류등대탄재료외부규화물층결구화성능적영향。결과표명，경왕수부식적석묵표면조조화，유리우침적층적생성화부착；예제체적직경위7mm、전압위52V、전류위60A시적항양화침적층구유교호적성능。
In this paper ,a combination of close and coM Pact silicide coating on the carbon material was formed by Rapid Chemical Liquid -phrase Deposition process (RCLD) .The effect of different diameter of preform ,different voltage and current ,holding time etal on the structure and perform‐ance for the silicide layer of carbon materials has been researched .The result showed that ,the graph‐ite was rusted by aqua regia appeared surface roughness ,which is conducive to the formation of sedi‐ment and adhesion .The antioxidative sediments has good performance with a 7 mm diameter ,volt‐age of 52 V and current of 60A .