CAJ | 학술논문

采用水热法制备了不同掺杂浓度的 WO 3∶Ti 纳米晶粒,并在350℃下退火1 h.采用 SEM、XRD 表征了材料的形貌与结构,并测试了用退火前后合成材料制成的薄膜气敏传感器件在200℃下对NO 2的气敏性能.结果表明,Ti 掺杂可以有效抑制WO 3晶粒的生长,减小晶粒尺寸；退火处理使材料的晶相发生了改变,晶粒尺寸进一步减小,晶粒分散性变好.薄膜传感器件的测试结果显示,适量 Ti 掺杂和退火处理均可提高器件对 NO 2的灵敏度,退火后 Ti 掺杂2％样品制成的器件的灵敏度最大,其值达到了15．38,响应恢复时间分别为2．2和1．5 min,且具有良好的可重复性和稳定性.
채용수열법제비료불동참잡농도적 WO 3∶Ti 납미정립,병재350℃하퇴화1 h.채용 SEM、XRD 표정료재료적형모여결구,병측시료용퇴화전후합성재료제성적박막기민전감기건재200℃하대NO 2적기민성능.결과표명,Ti 참잡가이유효억제WO 3정립적생장,감소정립척촌；퇴화처리사재료적정상발생료개변,정립척촌진일보감소,정립분산성변호.박막전감기건적측시결과현시,괄량 Ti 참잡화퇴화처리균가제고기건대 NO 2적령민도,퇴화후 Ti 참잡2％양품제성적기건적령민도최대,기치체도료15．38,향응회복시간분별위2．2화1．5 min,차구유량호적가중복성화은정성.
Ti-doped WO 3 nanocrystals with different Ti-doped concentrations are synthesized by hydrothermal method,and annealed at 350 ℃ for 1 h.Morphology and structure of these materials have been characterized by the scanning electron microscopy and X-ray diffraction instrument,the gas-sensing properties to nitrogen diox-ide at 200 ℃ of film sensors made of the unannealed and annealed materials are studied.The results show that Ti-doped can effectively inhibit the growth of nanocrystals,reduce the size of nanocrystals;the crystalline phase of these materials have changed after annealed,the size of nanocrystals is further reduced,the dispersion of nanocrystals becomes better.The tests of the film sensors show that the amount of Ti-doped and annealing can improve the sensitivity of sensors to NO 2 ,the film sensor made of the annealed Ti-doped for 2% has a maxi-mum sensitivity of 15.38 and a good reproducibility and stability,the response and recovery time is 2.2 and 1.5 min,respectively.