CAJ | 학술논문

用传统常压固相烧结法,制备掺杂氧化镁的氧化锌陶瓷靶材,研究不同MgO含量及烧结温度对MgxZn1-xO陶瓷靶材的微观结构、力学性能、致密度和导电性能的影响.通过X射线衍射仪(X-ray dif-fraction, XRD)测定靶材相结构,扫描式电子显微镜( scanning electron microscope, SEM)观察靶材的断面形貌,万能实验机测量靶材的抗弯强度,维氏显微硬度仪测量靶材的维氏硬度,阿基米德排水法测量靶材密度,四探针法测量靶材导电性能,对MgxZn1-xO靶材的性能进行了表征,分析了MgxZn1-xO陶瓷靶材的烧结机理.结果表明, MgxZn1-xO靶材的最佳烧结温度随着MgO含量的增加有所提高. MgO的掺杂比为x =0．12时,靶材的最佳烧结温度是1450℃；掺杂比为x =0．20时,靶材的最佳烧结温度约为1500℃.相同烧结温度下,随着MgO掺杂比的增加,靶材的致密性增大；靶材抗弯强度先升后降,掺杂比为x =0．12时达到最大值,为94．56 MPa.靶材硬度随着Mg含量的增加渐增,在1450℃烧结,掺杂比为0时维氏硬度为152．000 N/mm2,掺杂比为x =0．40时维氏硬度为364．045 N/mm2.靶材的导电性随着MgO掺杂比的增加呈渐减趋势,掺杂比为0时,方块电阻为819．36Ω；掺杂比为x =0．40时,方块电阻增至30．00 MΩ.
용전통상압고상소결법,제비참잡양화미적양화자도자파재,연구불동MgO함량급소결온도대MgxZn1-xO도자파재적미관결구、역학성능、치밀도화도전성능적영향.통과X사선연사의(X-ray dif-fraction, XRD)측정파재상결구,소묘식전자현미경( scanning electron microscope, SEM)관찰파재적단면형모,만능실험궤측량파재적항만강도,유씨현미경도의측량파재적유씨경도,아기미덕배수법측량파재밀도,사탐침법측량파재도전성능,대MgxZn1-xO파재적성능진행료표정,분석료MgxZn1-xO도자파재적소결궤리.결과표명, MgxZn1-xO파재적최가소결온도수착MgO함량적증가유소제고. MgO적참잡비위x =0．12시,파재적최가소결온도시1450℃；참잡비위x =0．20시,파재적최가소결온도약위1500℃.상동소결온도하,수착MgO참잡비적증가,파재적치밀성증대；파재항만강도선승후강,참잡비위x =0．12시체도최대치,위94．56 MPa.파재경도수착Mg함량적증가점증,재1450℃소결,참잡비위0시유씨경도위152．000 N/mm2,참잡비위x =0．40시유씨경도위364．045 N/mm2.파재적도전성수착MgO참잡비적증가정점감추세,참잡비위0시,방괴전조위819．36Ω；참잡비위x =0．40시,방괴전조증지30．00 MΩ.
MgxZn1-xO ceramic targets were prepared by using traditional solid-phase sintering method, and the effects of different MgO doping ratios and sintering temperatures on their microstructure, mechanical properties, density and electrical properties were studied. The MgxZn1-xO targets performance were characterized through specific analyses, including phase structure analysis by X-ray diffraction ( XRD) , fracture surface observation by scanning electron mi-croscope (SEM), bending strength measurement by universal-testing machine, Vickers hardness measurement by micro Vickers tester, density measurement by Archimedes principle, and conductivity measurement by the four-probe method. Also, a preliminary understanding of the sintering mechanism of MgxZn1-xO targets was better understood on the basis of the characterization. The results show that the best sintering temperature increases with the increase of the MgO content x in MgxZn1-xO. The optimal sintering temperature is 1 450 ℃, at the doping ratio x = 0. 12, and the optimal sintering temperature is 1 500 ℃, at the doping ratio x = 0. 20. At the same sintering temperature, the density increases with the increase of MgO content, while the bending strength first increases and then decreases with the maximum bending strength being 94. 56 MPa at the doping ratio x = 0. 12 . The hardness always increases with the increase of MgO content:Vickers hardness reaches 152. 000 N/mm2 without doping, and the hardness increases to 364. 045 N/mm2 at the doping ratio x =0. 40. The sheet conductivity gradually decreases with the increase of MgO doping ratio. The sheet resistance is 819. 36 Ω when doping ratio is 0 and it increases to 30. 00 MΩ when doping ratio x = 0. 40 .