CAJ | 학술논문

采用直流磁控溅射法在硅基底上制备 VO2薄膜，并对薄膜氧化热处理。分别对热处理前后薄膜进行 X 射线衍射（XRD）、傅里叶变换红外光谱（FTIR）透射率测试，分析了热处理对 VO2薄膜晶相成分与红外透射率相变特性的影响。实验分析表明，经热处理的 VO2发生非晶态向晶态转变，单斜金红石结构 VO2（011）晶体具有明显择优取向，晶粒尺寸均匀度提高，且薄膜的红外透射率具有明显相变特性，相变温度为60.5℃，3～5μm、8～12μm 波段的红外透射率对比值达到99％，适合应用于红外探测器的激光防护研究。
채용직류자공천사법재규기저상제비 VO2박막，병대박막양화열처리。분별대열처리전후박막진행 X 사선연사（XRD）、부리협변환홍외광보（FTIR）투사솔측시，분석료열처리대 VO2박막정상성분여홍외투사솔상변특성적영향。실험분석표명，경열처리적 VO2발생비정태향정태전변，단사금홍석결구 VO2（011）정체구유명현택우취향，정립척촌균균도제고，차박막적홍외투사솔구유명현상변특성，상변온도위60.5℃，3～5μm、8～12μm 파단적홍외투사솔대비치체도99％，괄합응용우홍외탐측기적격광방호연구。
VO2 thin films were prepared by DC magnetron sputtering on Si substrate,and then were annealed by oxida-tion.XRD and FITR were employed to study the effects of oxidational annealing on the crystal composition and infra-red transmission properties of VO2 thin films.The results of analysis show that the VO2 crystal after annealing has changed from non -crystalline structure to crystalline structure.The size of monoclinic rutile structure VO2 (01 1 ) which has a better crystal orientation is bigger.After oxidational annealing,the VO2 thin films possess a obvious phase transition properties with uniform size of crystal,the phase transition temperature is 60.5 ℃,and the change range of infrared transmission rate at 3 ~5 μm and 8 ~1 2 μm has reached to 99%.VO2 thin films which have obvious phase transition properties in infrared transmission are ideal material for the research for protecting infrared detector from la-ser attacking.