电子设计工程
電子設計工程
전자설계공정
ELECTRONIC DESIGN ENGINEERING
2015年
1期
87-89,92
,共4页
微机电系统%惯性测量单元%惯性导航系统%组合导航
微機電繫統%慣性測量單元%慣性導航繫統%組閤導航
미궤전계통%관성측량단원%관성도항계통%조합도항
MEMS%IMU%INS%integrated navigation
MEMS惯性技术是近年来战术级惯性导航的研究热点，也是惯性导航技术未来的主要发展方向之一。本文介绍了MEMS惯性传感器的发展概况，结合Draper实验室的MEMS惯性系统项目计划介绍了MEMS惯性系统的发展，分别介绍了MEMS惯性测量单元和MEMS组合导航技术的最新进展，并展望了MEMS惯性系统的发展趋势。高性能MEMS陀螺、芯片级MEMS-IMU和MEMS组合导航系统是MEMS惯性技术未来的发展趋势。
MEMS慣性技術是近年來戰術級慣性導航的研究熱點，也是慣性導航技術未來的主要髮展方嚮之一。本文介紹瞭MEMS慣性傳感器的髮展概況，結閤Draper實驗室的MEMS慣性繫統項目計劃介紹瞭MEMS慣性繫統的髮展，分彆介紹瞭MEMS慣性測量單元和MEMS組閤導航技術的最新進展，併展望瞭MEMS慣性繫統的髮展趨勢。高性能MEMS陀螺、芯片級MEMS-IMU和MEMS組閤導航繫統是MEMS慣性技術未來的髮展趨勢。
MEMS관성기술시근년래전술급관성도항적연구열점，야시관성도항기술미래적주요발전방향지일。본문개소료MEMS관성전감기적발전개황，결합Draper실험실적MEMS관성계통항목계화개소료MEMS관성계통적발전，분별개소료MEMS관성측량단원화MEMS조합도항기술적최신진전，병전망료MEMS관성계통적발전추세。고성능MEMS타라、심편급MEMS-IMU화MEMS조합도항계통시MEMS관성기술미래적발전추세。
Micro Electro Mechanical Systems (MEMS) has become a research hotspot of the tactical inertial navigation, and one of the main research directions for future inertial navigation technology. This survey is conducted for the development and application of MEMS inertial navigation. A brief introduction of MEMS inertial sensors is first given, also the development of MEMS inertial system is introduced by the research program of Draper laboratory, then the latest developments of MEMS inertial measurement unit (IMU) and MEMS integrated navigation system has been surveyed, at last the development trend of MEMS inertial system has been summarized. High-performance MEMS gyros, chip scale MEMS-IMU and MEMS integrated system is the development trend of the MEMS inertial technology.
