CAJ | 학술논문

文中针对银的晶格特征和银薄膜的生长特性，建立了基于KMC( Kinetic Monte Carlo)方法的银薄膜生长模型，模拟了单层Ag膜生长初期的表面形貌。在周期性基底且层间原子间采用交错排列的方式条件下，采用EAM( Embedded Atom Method)计算原子间作用势，并针对金属Ag的晶格特征及其成膜特性进行建模，编程，实验。实验结果表明：在温度不变的情况下，随着覆盖度的增加，表面原子的数量增多，且出现二维岛状生长；岛的生长形貌经历了从分散到凝聚生长的过程；原子岛的数量减少，同时岛的尺寸在增大。
문중침대은적정격특정화은박막적생장특성，건립료기우KMC( Kinetic Monte Carlo)방법적은박막생장모형，모의료단층Ag막생장초기적표면형모。재주기성기저차층간원자간채용교착배렬적방식조건하，채용EAM( Embedded Atom Method)계산원자간작용세，병침대금속Ag적정격특정급기성막특성진행건모，편정，실험。실험결과표명：재온도불변적정황하，수착복개도적증가，표면원자적수량증다，차출현이유도상생장；도적생장형모경력료종분산도응취생장적과정；원자도적수량감소，동시도적척촌재증대。
In this paper,aimed at the lattice characteristics of silver and silver film growth feature,the silver film growth model is set up based on KMC,surface morphology of monolayer Ag film is simulated. Under the condition of periodic basement and interlayer between atoms,use EAM ( Embedded Atom Method) to calculate the inter-atomic potential. According to the characteristics of the lattice of metal Ag and film-forming characteristic,carry out the modeling,programming,and experiment. The results show that in the case of constant temperature,with the increase of coverage, the number of surface atoms increases, and a two-dimensional island growth raises. The growth of the island morphology has experienced the process from scattered to the growth of the condensation. The number of atoms is-land is reduced,at the same time,the size of the island is increased.