CAJ | 학술논문

热变形是影响超精密机床精度的关键因素之一，而热导率是分析机床热变形准确度的决定性因素。为了保证机床温度场分布分析的准确性，提高机床的精度，提出一种基于热力学理论的热导率分析模型以及结合有限元分析的机床结构优化方法。建立自由电子气模型以及Debye模型，分别计算出自主设计的超精密光学磨床所采用的几种材料的热导率，提高热导率的准确性；进而利用有限元软件ANSYS分析机床主轴、溜板箱和床身的温度场分布；研究分析不同机床结构下主轴和机床整体的温升规律，提出基于热力学分析结果的一系列超精密光学磨床结构优化方法，针对误差敏感方向，采取对电动机与溜板箱的连接件以及电动机和主轴的接触件进行优化设计，减小热源与主轴、箱体之间的接触面积等方法，使机床热变形减小，提高了机床的精度。
열변형시영향초정밀궤상정도적관건인소지일，이열도솔시분석궤상열변형준학도적결정성인소。위료보증궤상온도장분포분석적준학성，제고궤상적정도，제출일충기우열역학이론적열도솔분석모형이급결합유한원분석적궤상결구우화방법。건립자유전자기모형이급Debye모형，분별계산출자주설계적초정밀광학마상소채용적궤충재료적열도솔，제고열도솔적준학성；진이이용유한원연건ANSYS분석궤상주축、류판상화상신적온도장분포；연구분석불동궤상결구하주축화궤상정체적온승규률，제출기우열역학분석결과적일계렬초정밀광학마상결구우화방법，침대오차민감방향，채취대전동궤여류판상적련접건이급전동궤화주축적접촉건진행우화설계，감소열원여주축、상체지간적접촉면적등방법，사궤상열변형감소，제고료궤상적정도。
Thermal conductivity is the decisive factor in the accuracy analysis of thermal deformation, which is one of the key reasons affecting the precision of ultra-precision machine. In order to ensure the accuracy of temperature field distribution analysis and improve the machine precision, a thermal conductivity analysis model based on thermodynamic theory and a structure optimization method of machine tools through the finite element analysis are presented. To improve the analysis accuracy of the thermal conductivity, free electron gas model and Debye model are applied to calculate the thermal conductivity of main materials of ultra-precision optical machine tools. The temperature field distribution of spindle, carriage and bed can be obtained through the finite element analysis software such as ANSYS. Based on the study of temperature rise law of the spindle and the complete machine, a structure optimization method of ultra-precision optical machine is finally presented in the error sensitive direction by reducing the contact area between the motor,spindle and carriage, optimizing the connections between the motor,spindle and carriage. As a result, the thermal deformation is reduced and the machine accuracy is improved.