CAJ | 학술논문

针对大型等离子体干法刻蚀生产设备的工艺特点，根据公司的生产实际需求，对原有损坏机台控制系统进行了重新改造设计。基于真空系统、工艺气体混合调节系统、射频微波放电系统、传动控制系统和终点检测系统等各子系统的控制难点及实现过程，设计了以三菱Q06 PLC为核心和InTouch 10．0为上位机监控软件的等离子体干法刻蚀设备控制系统。在InTouch 10．0平台上，搭建了等离子体干法刻蚀系统的监控界面，通过上位机处理大量生产制程数据和归档重要配方参数，实现生产工艺流程各个环节的实时监控、设备工作运行状态的参数显示和系统的故障报警等功能。
침대대형등리자체간법각식생산설비적공예특점，근거공사적생산실제수구，대원유손배궤태공제계통진행료중신개조설계。기우진공계통、공예기체혼합조절계통、사빈미파방전계통、전동공제계통화종점검측계통등각자계통적공제난점급실현과정，설계료이삼릉Q06 PLC위핵심화InTouch 10．0위상위궤감공연건적등리자체간법각식설비공제계통。재InTouch 10．0평태상，탑건료등리자체간법각식계통적감공계면，통과상위궤처리대량생산제정수거화귀당중요배방삼수，실현생산공예류정각개배절적실시감공、설비공작운행상태적삼수현시화계통적고장보경등공능。
Based on the controI difficuIties and impIementation process with the Vacuum system ,gas mixed adjustment system,ra-dio frequency and microwave system and transmission system,and other subsystems,the PIasma Dry Etching controI sys-tems are to optimize and design using the Mitsubishi Q06 PLC for core and InTouch 10.0 for monitoring software.On the InTouch configuration software pIatform,a monitoring interface gIass pIasma dry etching controI system has been buiIt, through data processing of a IPC and archiving of mass production processes of the important parameters.