CAJ | 학술논문

目的：制备新型导电探针,解决目前探针针尖曲率半径较粗、饱磁力大、调频困难、不容易得到高分辨图像等问题。方法向Si探针针尖蒸镀导电金属薄膜得到导电薄膜Si探针,镀Fe薄膜厚度约为几纳米,同时保证探针的曲率半径约10 nm。利用透射电镜观察和超高真空原子力显微镜扫描镀膜前后探针NaCl(001)表面,分析其性能。结果自制的Fe薄膜Si探针由于蒸镀了金属薄膜,探针针尖性能稳定,Si探针扫描效果的悬挂键影响被消除,同时提高了系统的扫描分辨率。结论导电薄膜Si探针能够充分利用现有的仪器设备进行实验,具有造价低、使用简单、性能稳定等优点,可以作为将来磁交换力显微镜( MExFM)的磁性探针来测试材料的表面磁信息。
목적：제비신형도전탐침,해결목전탐침침첨곡솔반경교조、포자력대、조빈곤난、불용역득도고분변도상등문제。방법향Si탐침침첨증도도전금속박막득도도전박막Si탐침,도Fe박막후도약위궤납미,동시보증탐침적곡솔반경약10 nm。이용투사전경관찰화초고진공원자력현미경소묘도막전후탐침NaCl(001)표면,분석기성능。결과자제적Fe박막Si탐침유우증도료금속박막,탐침침첨성능은정,Si탐침소묘효과적현괘건영향피소제,동시제고료계통적소묘분변솔。결론도전박막Si탐침능구충분이용현유적의기설비진행실험,구유조개저、사용간단、성능은정등우점,가이작위장래자교환력현미경( MExFM)적자성탐침래측시재료적표면자신식。
ABSTRACT:Objective To prepare a novel conductive probe to solve the existing problems such as the relatively large curvature radius of the tip of the conductive cantilever, high saturated magnetic force, low resolution and bad modulation. Methods A con-ductive film Si probe was obtained by evaporating of the Si probe tip with conductive metal thin film, the thickness of the Fe film was only a few nanometers, and meanwhile the curvature radius was ensured to be around 10 nm. The probe NaCl(001) surface before and after coating was observed and scanned by TEM and UHV-AFM, respectively, and the properties were analyzed. Re-sults Because of the metal thin film evaporation, the home-built Fe thin film Si probe had a stable probe tip performance, and the hanging key effect of Si probe scanning was eliminated. At the same time, the scanning resolution of the system was elevated. Conclusion Conductive film Si probe made full use of existing equipments for experiments. It has advantages such as low cost, easy to use and stable performance. It can be used as an important tool for the magnetic exchange force measurements in spin research at atomic resolution in the future.