CAJ | 학술논문

为了提高超精密定位系统的定位精度和行程，设计一种新型的单级驱动气动伺服定位平台。以金属波纹管为执行机构，以气浮导轨支撑，研究无摩擦条件下的较大行程的精密控制。为减少建立 PI 模型时的算子数量，减小求逆过程的计算量，提高建模精度，改进基本迟滞算子，建立基于广义迟滞算子的广义PI模型，并对模型进行验证。给出广义PI模型的求解析逆方法。设计基于广义 PI 逆模型的复合控制方案，并进行试验研究。结果表明，基于广义逆模型的阶跃响应系统的定位精度达到30 nm，锯齿波和复频跟踪试验输入下，基于PI逆模型的跟踪精度平均误差为0.96μm和0.63μm，基于广义PI逆模型的跟踪精度平均误差为0.49μm和0.45μm。试验数据表明改进广义PI模型对于增加系统定位精度有效。
위료제고초정밀정위계통적정위정도화행정，설계일충신형적단급구동기동사복정위평태。이금속파문관위집행궤구，이기부도궤지탱，연구무마찰조건하적교대행정적정밀공제。위감소건립 PI 모형시적산자수량，감소구역과정적계산량，제고건모정도，개진기본지체산자，건립기우엄의지체산자적엄의PI모형，병대모형진행험증。급출엄의PI모형적구해석역방법。설계기우엄의 PI 역모형적복합공제방안，병진행시험연구。결과표명，기우엄의역모형적계약향응계통적정위정도체도30 nm，거치파화복빈근종시험수입하，기우PI역모형적근종정도평균오차위0.96μm화0.63μm，기우엄의PI역모형적근종정도평균오차위0.49μm화0.45μm。시험수거표명개진엄의PI모형대우증가계통정위정도유효。
In order to improve the accuracy and stroke of the ultra-precision positioning stage, a new type of pneumatic servo positioning stage with single driving device is designed. Metal bellows are used as driving device in the positioning stage, the stage is supported by air flotation sliders to realize large stoke and ultra-precision positioning. In order to reduce the number of operators and to improve modeling accuracy, hysteresis operators are modified to build the generalized PI model, and the model is validated too. A solution of the inverse generalized PI model is given. The compounding controller is designed based on inverse generalized PI model. Experiments are implemented on the step signal, sawtooth signal and multifrequency signal. The results show that the positioning accuracy of the step response is less than 30 nm, the average tracking errors on sawtooth and multifrequency input are 0.96 μm and 0.63 μm based on the PI model, and the average tracing errors are 0.49 μm,and 0.45 μm based on generalized PI model. Experiments show that the generalized PI model is effective for increasing the positioning accuracy of the stage.