机械工程学报
機械工程學報
궤계공정학보
CHINESE JOURNAL OF MECHANICAL ENGINEERING
2015年
2期
1-6
,共6页
李志渤%黄强先%史科迪%韩彬%余惠娟
李誌渤%黃彊先%史科迪%韓彬%餘惠娟
리지발%황강선%사과적%한빈%여혜연
微纳米三坐标测量机%三维纳米测头%聚偏氟乙烯薄膜%三维谐振触发测头%三维谐振触发定位系统
微納米三坐標測量機%三維納米測頭%聚偏氟乙烯薄膜%三維諧振觸髮測頭%三維諧振觸髮定位繫統
미납미삼좌표측량궤%삼유납미측두%취편불을희박막%삼유해진촉발측두%삼유해진촉발정위계통
micro-nano coordinating measuring machine%three-dimensional nano probe%poly vinylidene fluoride(PVDF) film%three-dimensional resonant trigger probe%three-dimensional resonant trigger positioning system
微纳米三坐标测量机(Coordinate measuring machining, CMM)是目前微纳米三维测量领域的一个研究热点，针对微纳米CMM中三维纳米测头的研究瓶颈，提出一种与现有机械接触式测头和光学非接触式测头工作原理完全不同的、可达到纳米/亚纳米量级触发分辨力的新型谐振测头。利用聚偏氟乙烯(Poly vinylidene fluoride, PVDF)薄膜的压电特性和其谐振参数对微小作用力的高敏感性，PVDF薄膜与一体式光纤微测杆测球相结合构建成了基于PVDF薄膜的三维纳米谐振触发测头。该测头在z 向以轻敲模式接触，在x、y向以摩擦模式接触。经过试验验证，由该测头与三维纳米定位平台、数据处理及反馈控制系统相结合构建成的三维谐振纳米触发定位系统在x、y、z三个方向的触发分辨力都达到了亚纳米量级，分别为0.12 nm、0.10 nm、0.12 nm；三维重复性误差分别为26 nm、36 nm、10 nm。试验结果证实了新型三维谐振测头及其系统的有效性。
微納米三坐標測量機(Coordinate measuring machining, CMM)是目前微納米三維測量領域的一箇研究熱點，針對微納米CMM中三維納米測頭的研究瓶頸，提齣一種與現有機械接觸式測頭和光學非接觸式測頭工作原理完全不同的、可達到納米/亞納米量級觸髮分辨力的新型諧振測頭。利用聚偏氟乙烯(Poly vinylidene fluoride, PVDF)薄膜的壓電特性和其諧振參數對微小作用力的高敏感性，PVDF薄膜與一體式光纖微測桿測毬相結閤構建成瞭基于PVDF薄膜的三維納米諧振觸髮測頭。該測頭在z 嚮以輕敲模式接觸，在x、y嚮以摩抆模式接觸。經過試驗驗證，由該測頭與三維納米定位平檯、數據處理及反饋控製繫統相結閤構建成的三維諧振納米觸髮定位繫統在x、y、z三箇方嚮的觸髮分辨力都達到瞭亞納米量級，分彆為0.12 nm、0.10 nm、0.12 nm；三維重複性誤差分彆為26 nm、36 nm、10 nm。試驗結果證實瞭新型三維諧振測頭及其繫統的有效性。
미납미삼좌표측량궤(Coordinate measuring machining, CMM)시목전미납미삼유측량영역적일개연구열점，침대미납미CMM중삼유납미측두적연구병경，제출일충여현유궤계접촉식측두화광학비접촉식측두공작원리완전불동적、가체도납미/아납미량급촉발분변력적신형해진측두。이용취편불을희(Poly vinylidene fluoride, PVDF)박막적압전특성화기해진삼수대미소작용력적고민감성，PVDF박막여일체식광섬미측간측구상결합구건성료기우PVDF박막적삼유납미해진촉발측두。해측두재z 향이경고모식접촉，재x、y향이마찰모식접촉。경과시험험증，유해측두여삼유납미정위평태、수거처리급반궤공제계통상결합구건성적삼유해진납미촉발정위계통재x、y、z삼개방향적촉발분변력도체도료아납미량급，분별위0.12 nm、0.10 nm、0.12 nm；삼유중복성오차분별위26 nm、36 nm、10 nm。시험결과증실료신형삼유해진측두급기계통적유효성。
Recently, micro-nano coordinating measuring machine(CMM) has become a research focus in the field of three-dimensional(3D) micro-nano measurement. Due to the difficulty of the development of a 3D nano probe, a novel 3D resonant trigger probe has been proposed. This probe can reach nanometer/sub-nanometer resolution in three-dimensions, and its operation principle is different from the present contact probes and optical non-contact probes. The 3D nano resonant trigger probe is constructed by a piece of piezo-electrical PVDF film, two piezo-actuators, an integrated fiber micro-stem and micro-ball tip. The PVDF film vibrates at its resonant frequency and acts as a sensor. Using the piezoelectric property of PVDF film and the high sensitivity of its resonant parameters to the micro-force, the probe can give 3D trigger signal. The probe contacts the sample in traditional tapping-mode inz direction and friction-mode in bothx andy directions. Experimental results show that the trigger resolution of 3D resonant trigger positioning system constructed by the above probe, 3D nano positioning unit, the feedback control module and the signal processing circuit could reach sub-nanometer resolution, which is 0.12 nm inx direction and 0.10 nm iny direction, while 0.12 nm inz direction. The 3D repeatability error is 26 nm, 36 nm and 10 nm respectively. The results demonstrate the validity of the new type of 3D nano resonant trigger probe and positioning system.
