CAJ | 학술논문

首先建立了一种由相同宽度的金属带，SiO2间隔层与Si介质脊构成的导体-夹层-硅基结构(Conductor-Gap-Silicon,CGS)的混合等离子激元波导模型，分析了间隔层的厚度以及波导宽度对模式传输特性的影响，提出了模场面积为0.08μm2与430μm传输距离的设计方案。在此基础上，通过增加数值模型中介质脊的宽度而形成硅基板CGS波导结构。数值分析结果表明：硅基板CGS波导可将模式有效折射率增至2.8，同时传输长度能够延长到1.74 mm。并且模场面积可以进一步压缩到0.025μm2。此外，硅基板CGS波导制作更加简便，并可采用现有COMS制作技术完成，进而具有较大的实用前景。
수선건립료일충유상동관도적금속대，SiO2간격층여Si개질척구성적도체-협층-규기결구(Conductor-Gap-Silicon,CGS)적혼합등리자격원파도모형，분석료간격층적후도이급파도관도대모식전수특성적영향，제출료모장면적위0.08μm2여430μm전수거리적설계방안。재차기출상，통과증가수치모형중개질척적관도이형성규기판CGS파도결구。수치분석결과표명：규기판CGS파도가장모식유효절사솔증지2.8，동시전수장도능구연장도1.74 mm。병차모장면적가이진일보압축도0.025μm2。차외，규기판CGS파도제작경가간편，병가채용현유COMS제작기술완성，진이구유교대적실용전경。
A subwavelength conductor gap silicon (CGS) hybrid plasma waveguide was theoretically analyzed, which consisted of a thin low-index layer sandwiched between a silver strip and a high index silicon structure. The guiding properties of surface plasmon polaritons, such as propagation length and mode field area, were investigated for different rib widths and silica gap layer thickness. As a result, an effective modal area of 0.08 μm2 and the propagation length of 430 μm can be achieved simultaneously. Based on which, the silicon slab based CGS waveguide can be formed by increasing the width of silicon rib, it should be noted that the structure can generate the larger effective refractive index value of 2.8 and the propagation length of 1.74 mm, moreover, it provided a more strong confinement of the optical field such as 0.025 μm2 thickness SiO2 gap. In addition, more simple structure and CMOS compatible fabrication process make these conductor gap silicon plasmonic waveguide a promising candidate for realizing high integration density plasmonic circuits.