CAJ | 학술논문

提出了一种用于测量微观表面三维形貌的宽带光八步移相算法。该算法通过定位宽带光干涉条纹的零相位差位置实现微观轮廓的测量。计算宽带光移相干涉信号中相邻采样点的相位差得到实际移相间隔，从而实现实际移相量的在线标定以及移相误差的校正。分析了倾斜SiC平面的移相干涉条纹，计算结果的标准均方差为1.646 nm，与不存在移相误差时的计算结果吻合。宽带光八步移相算法对干涉包络的变化不敏感，能够抑制移相误差，是一种实用、高精度的微观表面轮廓测量方法。
제출료일충용우측량미관표면삼유형모적관대광팔보이상산법。해산법통과정위관대광간섭조문적령상위차위치실현미관륜곽적측량。계산관대광이상간섭신호중상린채양점적상위차득도실제이상간격，종이실현실제이상량적재선표정이급이상오차적교정。분석료경사SiC평면적이상간섭조문，계산결과적표준균방차위1.646 nm，여불존재이상오차시적계산결과문합。관대광팔보이상산법대간섭포락적변화불민감，능구억제이상오차，시일충실용、고정도적미관표면륜곽측량방법。
An eight-step broadband light phase shifting algorithm was proposed for the determination of three dimensional micro textures. The actual phase step was calibrated to eliminate the phase shifting error, from the difference between the phase values of two neighbored sampling of the broadband light interference signal. The microscopic interference fringes with phase shifting error of the oblique SiC flat were analyzed. The standard deviation is 1.646 nm, showing excellent agreement with the result obtained without phase shifting error. The proposed method, insensitive to envelop variation and phase shifting error of the interference signal, is practical and accurate for understanding three dimensional micro textures.