中国光学
中國光學
중국광학
CHINESE JOURNAL OF OPTICS
2015年
2期
277-298
,共22页
梁静秋%梁中翥%吕金光%秦余欣%田超%王维彪
樑靜鞦%樑中翥%呂金光%秦餘訢%田超%王維彪
량정추%량중저%려금광%진여흔%전초%왕유표
红外光谱仪%傅里叶变换红外光谱仪%微型%微光机电系统
紅外光譜儀%傅裏葉變換紅外光譜儀%微型%微光機電繫統
홍외광보의%부리협변환홍외광보의%미형%미광궤전계통
infrared spectrometer%Fourier transform infrared spectrometer( FTIR)%micro%Micro-Opto-Eletro-Mechanical Systems( MOEMS)
针对目前环境、医疗、空间、气象、军事及安全等领域对傅里叶变换红外光谱仪微小型化、轻量化及固态化的迫切需求，提出并研究了一种以MOEMS多级微反射镜为核心器件的空间调制微型傅里叶变换红外光谱仪。在理论研究方面，建立了空间调制微型傅里叶变换红外光谱仪的物理模型，探究了该系统的光场分割与空间采样的光学原理；分析了多级微反射镜的衍射效应，提出了一种通过补边抑制衍射噪声抑制方法；进行了多级微反射镜采样误差的分析，并提出了基于最小二乘拟合的修正算法；通过对光源空间相干性、准直系统像差以及入射光场均匀性的分析，确定了光学系统的总体设计指标；通过对多级微反射镜基片加工精度、分束器材料色散特性和膜层透射效率等的计算分析，确定了干涉系统的设计方法与技术参数。在核心技术方面，提出了两个多级微反射镜的3种制作方法，分析了制作误差的来源及对系统性能的影响。通过工艺设计及实验条件探索，分别采用电铸法、真空镀膜法以及斜面倾角叠片法制作了两个多级微反射镜。在系统设计方面，进行了红外准直与缩束系统的光学设计，对整体光机系统进行了建模仿真，分析了杂散光噪声的来源。在图谱处理方面，利用过零采样方式，通过图像分割算法，获取了干涉图采样序列；通过对干涉图序列的插值、补零、延拓与卷积方法，完成了光谱相位误差的校正；通过离散傅里叶变换解调，实现了由干涉图像到信号光谱的数据反演。最后研究了系统光机整体的集成组装技术，并对原理样机进行了实验测试。本文研制的空间调制微型傅里叶变换红外光谱仪的特点在于：取消了动镜驱动机构与采样控制机构，具有微小型与轻量化的特点；干涉图的采样由多级微反射镜完成，其空间采样的方式增加了系统的稳定性与可靠性，实时采样的特点增加了系统的快速性与有效性；多级微反射镜阵列采用MOEMS工艺技术制作，增加了系统的采样精度。该光谱仪系统的结构及制作方法具有自主知识产权，并具有广阔的应用前景。
針對目前環境、醫療、空間、氣象、軍事及安全等領域對傅裏葉變換紅外光譜儀微小型化、輕量化及固態化的迫切需求，提齣併研究瞭一種以MOEMS多級微反射鏡為覈心器件的空間調製微型傅裏葉變換紅外光譜儀。在理論研究方麵，建立瞭空間調製微型傅裏葉變換紅外光譜儀的物理模型，探究瞭該繫統的光場分割與空間採樣的光學原理；分析瞭多級微反射鏡的衍射效應，提齣瞭一種通過補邊抑製衍射譟聲抑製方法；進行瞭多級微反射鏡採樣誤差的分析，併提齣瞭基于最小二乘擬閤的脩正算法；通過對光源空間相榦性、準直繫統像差以及入射光場均勻性的分析，確定瞭光學繫統的總體設計指標；通過對多級微反射鏡基片加工精度、分束器材料色散特性和膜層透射效率等的計算分析，確定瞭榦涉繫統的設計方法與技術參數。在覈心技術方麵，提齣瞭兩箇多級微反射鏡的3種製作方法，分析瞭製作誤差的來源及對繫統性能的影響。通過工藝設計及實驗條件探索，分彆採用電鑄法、真空鍍膜法以及斜麵傾角疊片法製作瞭兩箇多級微反射鏡。在繫統設計方麵，進行瞭紅外準直與縮束繫統的光學設計，對整體光機繫統進行瞭建模倣真，分析瞭雜散光譟聲的來源。在圖譜處理方麵，利用過零採樣方式，通過圖像分割算法，穫取瞭榦涉圖採樣序列；通過對榦涉圖序列的插值、補零、延拓與捲積方法，完成瞭光譜相位誤差的校正；通過離散傅裏葉變換解調，實現瞭由榦涉圖像到信號光譜的數據反縯。最後研究瞭繫統光機整體的集成組裝技術，併對原理樣機進行瞭實驗測試。本文研製的空間調製微型傅裏葉變換紅外光譜儀的特點在于：取消瞭動鏡驅動機構與採樣控製機構，具有微小型與輕量化的特點；榦涉圖的採樣由多級微反射鏡完成，其空間採樣的方式增加瞭繫統的穩定性與可靠性，實時採樣的特點增加瞭繫統的快速性與有效性；多級微反射鏡陣列採用MOEMS工藝技術製作，增加瞭繫統的採樣精度。該光譜儀繫統的結構及製作方法具有自主知識產權，併具有廣闊的應用前景。
침대목전배경、의료、공간、기상、군사급안전등영역대부리협변환홍외광보의미소형화、경양화급고태화적박절수구，제출병연구료일충이MOEMS다급미반사경위핵심기건적공간조제미형부리협변환홍외광보의。재이론연구방면，건립료공간조제미형부리협변환홍외광보의적물리모형，탐구료해계통적광장분할여공간채양적광학원리；분석료다급미반사경적연사효응，제출료일충통과보변억제연사조성억제방법；진행료다급미반사경채양오차적분석，병제출료기우최소이승의합적수정산법；통과대광원공간상간성、준직계통상차이급입사광장균균성적분석，학정료광학계통적총체설계지표；통과대다급미반사경기편가공정도、분속기재료색산특성화막층투사효솔등적계산분석，학정료간섭계통적설계방법여기술삼수。재핵심기술방면，제출료량개다급미반사경적3충제작방법，분석료제작오차적래원급대계통성능적영향。통과공예설계급실험조건탐색，분별채용전주법、진공도막법이급사면경각첩편법제작료량개다급미반사경。재계통설계방면，진행료홍외준직여축속계통적광학설계，대정체광궤계통진행료건모방진，분석료잡산광조성적래원。재도보처리방면，이용과령채양방식，통과도상분할산법，획취료간섭도채양서렬；통과대간섭도서렬적삽치、보령、연탁여권적방법，완성료광보상위오차적교정；통과리산부리협변환해조，실현료유간섭도상도신호광보적수거반연。최후연구료계통광궤정체적집성조장기술，병대원리양궤진행료실험측시。본문연제적공간조제미형부리협변환홍외광보의적특점재우：취소료동경구동궤구여채양공제궤구，구유미소형여경양화적특점；간섭도적채양유다급미반사경완성，기공간채양적방식증가료계통적은정성여가고성，실시채양적특점증가료계통적쾌속성여유효성；다급미반사경진렬채용MOEMS공예기술제작，증가료계통적채양정도。해광보의계통적결구급제작방법구유자주지식산권，병구유엄활적응용전경。
According to the urgent requirement to the microminiature, lightweight, and staticize on Fourier transform infrared spectrometer in the field of environment, medical treatment, space exploration, meteorolo-gy, military and security, a spatial modulation Fourier transform infrared spectrometer based on MOEMS micro multi-step mirrors( MMSMs) was proposed.In theory, the physical model and the optical principle of spatial modulation Fourier transform infrared spectrometer was built and researched.A method of leaving extra pat-ches in the boundary to suppress diffraction noise was put forward, and an algorithm based on the least-squares approximation was proposed to correct sampling error.According to the analyzing on the fabrication accuracy of MMSMs, the dispersion characteristics and the transmission efficiency of the beam splitter, the design method and the technical parameters were determined.In the core technology, three different kinds of manufacture method of MMSMs were put forward.By ways of analyzing the origin of the error, the tolerance of two MMSMs was given.The two MMSMs were completed by the method of electroform, positioning of the growth multilayer film, and inclined plane method respectively.In the system design, the infrared collimation system and ima-ging system were designed and manufactured.According to modeling simulation of the whole machine system, the source of stray light noise was analyzed.In the interferogram processing, using zero crossing sampling model and image segmentation algorithm, the sampling sequence was obtained.By interpolation, zero filling, continuation and convolution of the interference sequence, the phase error of spectrum was corrected.After that, the spectrum was obtained from the interferogram via discrete Fourier transform.Finally, the integration and coupling technology of the system were researched.The characteristics of infrared spectrometer developed in this project were as follows:Firstly, the moving mirror driven mechanism and the sampling control mecha-nism were cancelled, hence, micro-miniature and lightweight were realized.Secondly, the spatial sampling mode through MMSMs increased the stability and reliability; the characteristics of real-time sampling de-creased time wastage and enhanced the optical efficiency.Thirdly, the MMSMs fabricated by MOEMS technol-ogy increased the sampling precision.Therefore, the infrared spectrometer designed by us has a great applica-tion prospect.
